Silicon nitride ($Si_3N_4$) planar waveguide platform combined with silicon-on-insulator (SOI) devices offer a whole new generation of system-on-chip applications. Therefore, efficient coupling of an $Si_3N_4$ waveguide to an SOI waveguide is essential. We present a coupler to interface a 1.8 $μm$-wide $Si_3N_4$ waveguide to a 0.5 $μm$-wide SOI waveguide based on the focusing property of the Luneburg lens. In order to match the refractive indices of the waveguides with the edges of the lens, one side of the lens is flattened with quasi-conformal transformation optics. The designed coupler is implemented by graded photonic crystals. The three-dimensional numerical simulations indicate that the 1.93 $μm$-long coupler has an average coupling loss of 0.13 dB in the C-band.
Silicon-on-insulator (SOI) waveguides with different geometries have been employed to design various integrated optical components. Reducing the bending radius of the SOI waveguides with low bending loss is essential in minimizing the footprint of light-wave circuits. The propagating mode is less confined in the core of the ultra-thin SOI waveguide and penetrates to substrate and cladding, leading to higher bending loss compared with conventional SOI waveguide with the thicker guiding layer. While various bending mechanisms have been utilized to reduce the bending loss of conventional SOI wave…
We present waveguide integrated high-speed Si photodetector integrated with silicon nitride (SiN) waveguide on SOI platform for short reach data communication in 850 nm wavelength band. We demonstrate a waveguide couple Si pin photodetector responsivity of 0.44 A/W at 25 V bias. The frequency response of the photodetector is evaluated by coupling of a femtosecond laser source through SiN grating coupler of the integrated photodetector. We estimate a 3dB bandwidth of 14 GHz at 20 V bias, highest reported bandwidth for a waveguide integrated Si photodetector. We also present detailed optoelectro…
The design and experimental demonstration of a large-area, ultra-high-Q-factor and single-mode operation silicon ring resonator based on a strip silicon photonic waveguide are presented, which is suitable for photon gyroscopic application. Based on these designs, simulation results show that the resonance depth is 0.9979 while the resonator is in an undercoupled state with the coupling length L=2um and coupling gap d=0.2um. For the fabricated resonator, the ultrahigh Q factor of 1.54*106 is experimentally demonstrated, with the free spectrum range (FSR) of 0.036nm and the resonance depth is 0.…
We report on a C-band double layer graphene electro-absorption modulator on a passive SOI platform showing 29GHz 3dB-bandwith and NRZ eye-diagrams extinction ratios ranging from 1.7 dB at 10 Gb/s to 1.3 dB at 50 Gb/s. Such high modulation speed is achieved thanks to the quality of the CVD pre-patterned single crystal growth and transfer on wafer method that permitted the integration of high-quality scalable graphene and low contact resistance. By demonstrating this high-speed CVD graphene EAM modulator integrated on Si photonics and the scalable approach, we are confident that graphene can sat…
In this letter, we demonstrate the integration of short metal nanoparticle chains (L \approx 700nm) supporting localized surface plasmons in Silicon On Insulator (SOI) waveguides at telecom wavelengths. Nanoparticles are deposited on the waveguide top and excited through the evanescent field of the TE waveguide modes. Finite difference time domain calculations and waveguide transmission measurements reveal that almost all the TE mode energy can be transferred to nanoparticle chains at resonance. It is also shown that the transmission level is very sensitive to the nanoparticle environment, thu…
Silicon photonic integration has gained great success in many application fields owing to the excellent optical device properties and complementary metal-oxide semiconductor (CMOS) compatibility. Realizing monolithic integration of III-V lasers and silicon photonic components on single silicon wafer is recognized as a long-standing obstacle for ultra-dense photonic integration, which can provide considerable economical, energy efficient and foundry-scalable on-chip light sources, that has not been reported yet. Here, we demonstrate embedded InAs/GaAs quantum dot (QD) lasers directly grown on t…
We report on two edge-coupling and power splitting devices for hybrid integration of III-V lasers with sub-micrometric silicon-on-insulator (SOI) waveguides. The proposed devices relax the horizontal alignment tolerances required to achieve high coupling efficiencies and are suitable for passively aligned assembly with pick-and-place tools. Light is coupled to two on-chip single mode SOI waveguides with almost identical power coupling efficiency, but with a varying relative phase accommodating the lateral misalignment between the laser diode and the coupling devices, and is suitable for the im…
The performance of plasmonic nanoantenna structures on top of SOI wire waveguides as coherent perfect absorbers for modulators and all-optical switches is explored. The absorption, scattering, reflection and transmission spectra of gold and aluminum nanoantenna-loaded waveguides were calculated by means of 3D finite-difference time-domain simulations for single waves propagating along the waveguide, as well as for standing wave scenarios composed from two counterpropagating waves. The investigated configurations showed losses of roughly 1% and extinction ratios greater than 25 dB for modulator…
We propose and numerically analyze the hybrid Si-Ge\textsubscript{2}Sb\textsubscript{2}Te\textsubscript{5} strip waveguide switches for Mid-IR wavelength of 2.1 $μ$m. The switches investigated are one input-one output (on-off) type and one input-two outputs (directional coupler) type. The reversible transition between the switch states is achieved by inducing the phase transition from crystalline to amorphous and vice-versa by application of voltage pulses. The approach of embedding the nanoscale active material Ge\textsubscript{2}Sb\textsubscript{2}Te\textsubscript{5} within the Si waveguide …
We report enhanced nonlinear optics in nanowires, waveguides, and ring resonators by introducing layered two-dimensional (2D) graphene oxide (GO) films through experimental demonstration. The GO films are integrated on silicon-on-insulator nanowires (SOI), high index doped silica glass, and silicon nitride (SiN) waveguides and microring resonators (MRRs), to demonstrate an improved optical nonlinearity including Kerr nonlinearity and four-wave mixing (FWM). By using a large-area, transfer-free, layer-by-layer GO coating method with photolithography and lift-off processes, we integrate GO films…
Integrated mid-infrared micro-spectrometers have a great potential for applications in environmental monitoring and space exploration. Silicon-on-insulator (SOI) is a promising platform to tackle this integration challenge, due to its unique capability for large volume and low-cost production of ultra-compact photonic circuits. However, the use of SOI in the mid-infrared is restricted by the strong absorption of the buried oxide layer for wavelengths beyond 4 μm. Here, we overcome this limitation by utilizing metamaterial-cladded suspended silicon waveguides to implement a spatial heterodyne F…
Layered 2D GO films are integrated with silicon on insulator (SOI) nanowire waveguides to experimentally demonstrate an enhanced Kerr nonlinearity, observed through selfphase modulation (SPM). The GO films are integrated with SOI nanowires using a large area, transfer free, layer by layer coating method that yields precise control of the film thickness. The film placement and coating length are controlled by opening windows in the silica cladding of the SOI nanowires. Owing to the strong mode overlap between the SOI nanowires and the highly nonlinear GO films, the Kerr nonlinearity of the hybr…
Optical isolators and circulators are indispensable for photonic integrated circuits (PICs). Despite of significant progress in silicon-on-insulator (SOI) platforms, integrated optical isolators and circulators have been rarely reported on silicon nitride (SiN) platforms. In this paper, we report monolithic integration of magneto-optical (MO) isolators on SiN platforms with record high performances based on standard silicon photonics foundry process and magneto-optical thin film deposition. We successfully grow high quality MO garnet thin films on SiN with large Faraday rotation up to -5900 de…
Intersection of two or more silicon slot waveguides is inevitable in modern optical integrated circuits based on silicon on insulator (SOI) platform. In this article, we design a Maxwell's fisheye lens as the crossing medium for three Si slot waveguides and numerically investigate its characteristics such as insertion loss, crosstalk and bandwidth. For the 3$\times$3 slot waveguide crossing, the average insertion loss of 1.2 dB and crosstalk levels lower than -15.1 dB are achieved in an ultra-wideband wavelength range of 415 nm covering the entire O, E, S, C, L, and U bands of optical communic…
The singlemode condition is one of the most important design rules for optical waveguides in guided-wave optics. The reason following the singlemode condition is that higher-order modes might be excited and thus introduce some undesired mode-mismatching loss as well as inter-mode crosstalk when light propagates along an optical waveguide beyond the singlemode regime. As a result, multimode photonic waveguides are usually not allowed. In this paper, we propose the concept of silicon photonics beyond the singlemode regime, developed with low-loss and low-crosstalk light propagation in multimode …
We experimentally demonstrate enhanced spectral broadening of femtosecond optical pulses af-ter propagation through silicon-on-insulator (SOI) nanowire waveguides integrated with two-dimensional (2D) graphene oxide (GO) films. Owing to the strong mode overlap between the SOI nanowires and the GO films with a high Kerr nonlinearity, the self-phase modulation (SPM) process in the hybrid waveguides is significantly enhanced, resulting in greatly improved spectral broadening of the femtosecond optical pulses. A solution-based, transfer-free coating method is used to integrate GO films onto the SOI…
Waveguide-integrated plasmonics is a growing field with many innovative concepts and demonstrated devices in the visible and near-infrared. Here, we extend this body of work to the mid-infrared for the application of surface-enhanced infrared absorption (SEIRA), a spectroscopic method to probe molecular vibrations in small volumes and thin films. Built atop a silicon-on-insulator (SOI) waveguide platform, two key plasmonic structures useful for SEIRA are examined using computational modeling: gold nanorods and coaxial nanoapertures. We find resonance dips of 80% in near diffraction-limited are…
We demonstrate a silicon photonic platform using thin buried oxide silicon-on-insulator (SOI) substrates using localized substrate removal. We show high confinement silicon strip waveguides, micro-ring resonators and nanotapers using this technology. Propagation losses for the waveguides using the cutback method are 3.88 dB/cm for the quasi-TE mode and 5.06 dB/cm for the quasi-TM mode. Ring resonators with a loaded quality factor (Q) of 46,500 for the quasi-TM mode and intrinsic Q of 148,000 for the quasi-TE mode have been obtained. This process will enable the integration of photonic structur…
Lithium niobate on insulator (LNOI) waveguides, as an emerging technology, have proven to offer a promising platform for integrated optics, due to their strong optical confinement comparable to silicon on insulator (SOI) waveguides, while possessing the versatile properties of lithium niobate, such as high electro-optic coefficients. In this paper, we show that mode hybridization, a phenomenon widely found in vertically asymmetric waveguides, can be efficiently modulated in an LNOI ridge waveguide by electro-optic effect, leading to a polarization mode converter with 97% efficiency. Moreover, …
We report enhanced nonlinear optics in complementary metal oxide semiconductor compatible photonic platforms through the use of layered two dimensional (2D) graphene oxide (GO) films. We integrate GO films with silicon on insulator nanowires (SOI), high index doped silica glass (Hydex) and silicon nitride (SiN) waveguides and ring resonators, to demonstrate an enhanced optical nonlinearity including Kerr nonlinearity and four wave mixing (FWM). The GO films are integrated using a large area, transfer free, layer by layer method while the film placement and size are controlled by photolithograp…
In this paper, we demonstrate strip-loaded guiding optical components realized on a 27 nm ultra-thin SOI platform. The absence of physically etched boundaries within the guiding core suppresses majorly the scattering loss, as shown by us previously for a silicon nitride (Si$_3$N$_4$) platform [Stefan \textit{et. al.}, OL 40, 3316 (2015)]. Unexpectedly, the freshly fabricated Si devices showed large losses of 5 dB/cm, originating from absorption by free carriers, accumulated under the positively charged Si$_3$N$_4$ loading layer. We use 254 nm ultraviolet (UV) light exposures to neutralize prog…
The implementation of optomechanical devices in silicon-on-insulator (SOI), the canonical silicon photonics technology is seriously hampered by the strong phonon leakage into the silica under-cladding. This limitation has been partially circumvented by total or partial removal of the silica under-cladding to form Si membranes or pedestal waveguides. However, this approach complicates integration with standard silicon optoelectronics circuitry, limiting the versatility and application of the strategy. Here, we propose and demonstrate a new strategy to confine photons and phonons in SOI without …
We present a compact on-chip resonator enhanced silicon-MSM photodetector in $850$ $nm$ wavelength band for communication and lab-on-chip bio-sensing applications. We report the highest responsivity of 0.81 A/W for a 5 $μm$ long device. High responsivity is achieved by integrating the detector in a silicon nitride ring resonator. The resonance offers 100X responsivity improvement over a single-pass photodetector due to cavity enhancement. We also present a detailed study of the high-speed response of the cavity and single-pass detector. We report an electro-optic bandwidth of 7.5 GHz measured …
We present a novel photonic wire-to-slot waveguide coupler in SOI. The phase matching between a wire and slot mode is achieved using a mode transformer. The architecture consists of a balanced 50/50 power splitter and a tunable phase matched taper combiner forming a slot waveguide. We show a theoretical wire-to-slot coupling efficiency of 99 % is achievable and experimentally, we demonstrate a coupling efficiency of 99 % in the 1550 nm band. Based on the coupling scheme, we also show excitation of a slot mode in a slotted ring resonator and verified the excitation through the thermo-optic resp…
We demonstrate a collinear acousto-optic modulator in a suspended film of lithium niobate employing a high-confinement, wavelength-scale waveguide. By strongly confining the optical and mechanical waves, this modulator improves by orders of magnitude a figure-of-merit that accounts for both acousto-optic and electro-mechanical efficiency. Our device demonstration marks a significant technological advance in acousto-optics that promises a novel class of compact and low-power frequency shifters, tunable filters, non-magnetic isolators, and beam deflectors.
This work represents a particular application of waveguide fabricated by femtosecond laser micromachining technology. More specifically, we report the development of an optical modulator based on the fabrication of single-mode optical waveguide structures buried in X-cut lithium niobate crystal with the femtosecond laser direct writing method. Here, change in refractive index profile is measured using near field intensity profile measurement method at optimized writing conditions. It has been observed that the change refractive index (Δn) is in the range of 10-4. Finally, the behavior of femto…
Optical differentiation and optical Hilbert transformation play important roles in communications, computing, information processing and signal analysis in optical domain which offering huge bandwidth. Meanwhile, silicon-based photonic integrated circuits are preferable in all-optical signal processing due to their intrinsic advantages of low power consumption, compact footprint and ultra-high speed. In this study, we analyze the interrelation between first-order optical differentiation and optical Hilbert transformation and then experimentally demonstrate a feasible integrated scheme which ca…
We fabricate silicon waveguides in silicon-on-insulator (SOI) wafers clad with either silicon dioxide, silicon nitride, or aluminum oxide, and by measuring the electro-optic behavior of ring resonators, we characterize the cladding-dependent and capacitively-induced free-carrier effects in each of these waveguides. By comparing our measured data with simulation results, we confirm that the observed voltage dependencies of the transmission spectra are due to changes in the concentrations of holes and electrons within the semiconductor waveguide, and we show for the first time how strongly these…
Lasing from SOI-integrated GaAsSb nanowires via resonator-driven optical feedback
Walter Schottky Institute, TUM School of Natural Sciences, Technical University of Munich（慕尼黑工业大学）；Institute of Physics and Astronomy, Technical University Berlin（柏林工业大学）
Single-photon emitters integrated into quantum optical circuits will enable new, miniaturized quantum optical devices. Here, we numerically investigate semiconductor quantum dots embedded to low refractive index contrast waveguides. We discuss a model to compute the coupling efficiency of the emitted light field to the fundamental propagation mode of the waveguide, and we optimize the waveguide dimensional parameters for maximum coupling efficiency. Further, we show that for a laterally cropped waveguide the interplay of Purcell-enhancement and optimized field profile can enhance the coupling …
A recent computational result suggests that highly confined modes can be realized by all-dielectric metamaterials (S. Jahani et. al., Optica 1, 96 (2014)). This substantially decreases crosstalk between dielectric waveguides, paving the way for high-density photonic circuits. Here, we experimentally demonstrate, on a standard silicon-on-insulator (SOI) platform, that using a simple metamaterial between two silicon strip waveguides results in about a 10-fold increase in coupling length. The proposed structure may lead to significant reduction in the size of devices in silicon photonics.
We numerically study silicon waveguides on silica showing that it is possible to simultaneously guide optical and acoustic waves in the technologically important silicon on insulator (SOI) material system. Thin waveguides, or fins, exhibit geometrically softened mechanical modes at gigahertz frequencies with phase velocities below the Rayleigh velocity in glass, eliminating acoustic radiation losses. We propose slot waveguides on glass with telecom optical frequencies and strong radiation pressure forces resulting in Brillouin gains on the order of 500 and 50,000 1/(Wm) for backward and forwar…
The third-order optical nonlinearity in optical waveguides has found applications in optical switching, optical wavelength conversion, optical frequency comb generation, and ultrafast optical signal processing. The development of an integrated waveguide platform with a high nonlinearity is therefore important for nonlinear integrated photonics. Here, we report the observation of an enhancement in the nonlinearity of an air-cladding silicon pedestal waveguide. We observe enhanced nonlinear spectral broadening compared to a conventional silicon-on-insulator waveguide. At the center wavelength of…
We extend the concept of shortcut to adiabaticity to full-wave optics and provide application to the design of an ultra-compact waveguide junction. In particular, we introduce a procedure allowing one to synthesize a purely dielectric optical potential that precisely compensates for the non-adiabatic losses of the transverse-electric fundamental mode in any (sufficiently regular) two-dimensional waveguide junction. Our results are corroborated by finite-element method numerical simulations in a Poschl-Teller waveguide mode expander.
Silicon is an extremely attractive material platform for integrated optics at telecommunications wavelengths, particularly for integration with CMOS circuits. Developing detectors and electrically pumped lasers at telecom wavelengths are the two main technological hurdles before silicon can become a comprehensive platform for integrated optics. We report on the generation of free carriers in unimplanted SOI ridge waveguides, which we attribute to surface state absorption. By electrically contacting the waveguides, a photodetector with a responsivity of 36 mA/W and quantum efficiency of 2.8% is…
We report a study of using the same material to fabricate a whispering gallery mode resonator and a coupler. Coupling to high Q whispering gallery modes of the lithium niobate resonator is demonstrated by means of the titanium-doped waveguide. The waveguide coupling approach opens possibilities for simpler and wider practical usage of whispering gallery mode resonators and their integration into optical devices.
We study light-beam propagation in a nonlinear coupler with an asymmetric double-channel waveguide and derive various analytical forms of optical modes. The results show that the symmetry-preserving modes in a symmetric double-channel waveguide are deformed due to the asymmetry of the two-channel waveguide, yet such a coupler supports the symmetry-breaking modes. The dispersion relations reveal that the system with self-focusing nonlinear response supports the degenerate modes, while for self-defocusingmedium the degenerate modes do not exist. Furthermore, nonlinear manipulation is investigate…
We show that the implementation of the longitudinal displacement technique for adjusting the coupling coefficients in microring waveguides is subject to a phase asymmetry effect. This issue is shown to substantially alter the system response in apodized filters and cannot be ignored in the design stage.
We analyze wave propagation in coupled planar waveguides, pointing specific attention to modal cross-talk and out-of-plane scattering in quasi-planar photonics. An algorithm capable of accurate numerical computation of wave coupling in arrays of planar structures is developed and illustrated on several examples of plasmonic and volumetric waveguides. An analytical approach to reduce or completely eliminate scattering and modal cross-talk in planar waveguides with anisotropic materials is also presented.
At a fixed frequency, a general wave field in an open optical waveguide is a sum of finite number of guided modes and an integral of radiation modes. Most studies on open lossless dielectric waveguides are concerned with regular guided modes which are confined around the waveguide core, have a real propagation constant, and propagate along the waveguide axis without attenuation. However, there may be guided modes with a complex propagation constant even though the waveguide consists of lossless isotropic dielectric materials, and they are the so-called complex modes. The complex modes are prop…
We show that nonreciprocal optical Bloch-like oscillations can emerge in transversely magnetized waveguide arrays in the presence of an effective index step between the waveguides. Normal modes of the system are shown to acquire different wavenumbers in opposite propagation directions. Significant differences in phase coherence and decoherence between these normal modes are presented and discussed. Non-reciprocity is established by imposing unequal vertical refractive index gradients at the substrate/core, and core/cover interfaces in the presence of transverse magnetization.
This paper theoretically analyzes the optical transmission characteristics of an optical waveguide when coupling to a micro cavity array. The results showed that not only were there sharp peaks on the transmission and reflection spectra, but also that a certain system configuration can produce a backward wave to obtain a phase shift in the small detuning range between the incident wave and the micro cavities. Based on a discussion of the relationship between the transmission and the number and the dissipation coefficients of each coupled micro cavity, the paper proposes a high efficiency all-o…
We demonstrate a silicon nitride trench waveguide deposited with bowtie antennas for plasmonic enhanced optical trapping. The sub-micron silicon nitride trench waveguides were fabricated with conventional optical lithography in a low cost manner. The waveguides embrace not only low propagation loss and high nonlinearity, but also the inborn merits of combining micro-fluidic channel and waveguide together. Analyte contained in the trapezoidal trench channel can interact with the evanescent field from the waveguide beneath. The evanescent field can be further enhanced by plasmonic nanostructures…
We introduce continuous supersymmetric transformations to manipulate the modal content in systems of optical waveguides, providing a systematic method to design efficient and robust integrated devices such as tapered waveguides, single-waveguide mode filters, beam splitters and interferometers. These transformations connect superpartner profiles by smoothly modifying the transverse index profile along the propagation direction and, if the modification is performed adiabatically, the transverse electric modes evolve adapting their shape and propagation constant without being coupled to other gu…
We identify a route towards achieving a negative index of refraction at optical frequencies based on coupling between plasmonic waveguides that support backwards waves. We show how modal symmetry can be exploited in metal-dielectric waveguide pairs to achieve negative refraction of both phase and energy. By properly controlling coupling between adjacent waveguides, a metamaterial consisting of a one-dimensional multilayer stack exhibiting an isotropic index of -1 can be achieved at a free-space wavelength of 400 nm. The general concepts developed here may inspire new low-loss metamaterial desi…
In this paper we present the design, manufacturing, characterization and analysis of the coupling ratio spectral response for Multimode Interference (MMI) couplers in Silicon-on-Insulator (SOI) technology. The couplers were designed using a Si rib waveguide with SiO 2 cladding, on a regular 220 nm film and 2 μm buried oxide SOI wafer. A set of eight different designs, three canonical and five using a widened/narrowed coupler body, have been subject of study, with coupling ratios 50:50, 85:15 and 72:28 for the former, and 95:05, 85:15, 75:25, 65:35 and 55:45 for the latter. Two wafers of device…
Transformation optics gives rise to numerous unusual optical devices, such as novel metamaterial lenses and invisibility cloaks. Very recently Mattheakis et al. have suggested theoretical design of an optical waveguide based on a network of Luneburg lenses, which may be useful in sensing and nonlinear optics applications. Here we report the first experimental realization of such Luneburg waveguides. We have studied wavelength and polarization dependent performance of the waveguides.
In this work we demonstrate the existence of orbital angular momentum (OAM) bright and dark supermodes in a three-evanescently coupled cylindrical waveguides system. Bright and dark supermodes are characterized by their coupling and decoupling from one of the waveguides, respectively. In addition, we demonstrate that complex couplings between modes of different waveguides appear naturally due to the characteristic spiral phase-front of OAM modes in two-dimensional configurations where the waveguides are arranged forming a triangle. Finally, by adding dissipation to the waveguide uncoupled to t…
