arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 1912.03326physics.app-phphysics.optics
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基于多层Si3N4/SiO2平台的高效端射三维光学相控阵

High efficiency end-fire 3-D optical phased array based on multi-layers Si3N4/SiO2 platform

Dachuan Wu, Yasha Yi, Yuxiao Zhang

摘要:

光学相控阵等光束控制器件是固态激光雷达和无线通信应用中的关键器件。传统的单层光学相控阵(OPA)由于光栅耦合器结构向下耦合引起的衬底泄漏而导致显著的能量损失。在这项工作中,我们研究了一种基于多层Si 3 N4/SiO2平台的结构,该结构可以形成一个三维OPA,从器件的边缘以高效率发射光,一个二维会聚的外耦合光束将被端射到空气中。数值模拟结果表明,该器件具有高效率和宽的水平波束控制范围,并讨论了垂直串扰、延迟长度、波导层数以及制作工艺的可行性。

英文摘要:

Beam steering device such as optical phased array (OPA) is a key component in applications of solid-state Lidar and wireless communication. The traditional single-layer optical phased array (OPA) results in a significant energy loss due to the substrate leakage caused by the downward coupling from the grating coupler structure. In this work we have investigated a structure based on multi-layers Si3N4/SiO2 platform that can form a 3-D OPA to emit the light from the edge of the device with high efficiency, a 2-D converged out-coupling beam will be end-fired to the air. The high efficiency and wide horizontal beam steering are demonstrated numerically, the influence of vertical cross-talk, the delay length, number of waveguide layers, and the fabrication feasibility are also discussed.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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