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arXiv 1907.09787cond-mat.mtrl-sciphysics.app-ph
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超高频体声波在GaAs中的产生与传播

Generation and propagation of super-high-frequency bulk acoustic wave in GaAs

Diego H. O. Machado, Antonio Crespo-Poveda, Alexander S. Kuznetsov, Klaus Biermann, Luis V. A. Scalvi, Paulo V. Santos

摘要:

相干超高频(SHF)振动提供了一个很好的工具,调制和控制半导体中的激励。在这里,我们调查的压电产生和传播的纵向体声波(LBAWs)的频率高达20 GHz的GaAs晶体使用体声波谐振器(BAWRs)的基础上的压电薄膜ZnO薄膜。我们发现,BAWRs的电声转换效率敏感地依赖于ZnO薄膜的溅射条件。的BAWRs,然后用于研究的传播特性的LBAWs在GaAs中的频率和温度范围从1到20 GHz和10和300 K,分别,迄今为止还没有实验访问。我们发现在80 ~ 300 K温度范围内GaAs的本征声吸收主要是热声子散射。相反,在较低的温度下,固有声吸收在频率相关的值处饱和。用不同的传播长度进行的实验表明,饱和度与样品边界处反射期间的损耗有关。我们还展示了高品质因数的声学布拉格反射器上制作的设备。这里提出的结果证明了嵌入GaAs基纳米结构的高质量声学谐振器的可行性,从而为电激励SHF LBAW调制和控制其特性开辟了道路。

英文摘要:

Coherent super-high-frequency (SHF) vibrations provide an excellent tool for the modulation and control of excitations in semiconductors. Here, we investigate the piezoelectric generation and propagation of longitudinal bulk acoustic waves (LBAWs) with frequencies up to 20 GHz in GaAs crystals using bulk acoustic wave resonators (BAWRs) based on piezoelectric thin ZnO films. We show that the electro-acoustic conversion efficiency of the BAWRs depends sensitively on the sputtering conditions of the ZnO films. The BAWRs were then used for the study of the propagation properties of the LBAWs in GaAs in the frequency and temperature ranges from 1 to 20 GHz and 10 and 300 K, respectively, which have so far not been experimentally accessed. We found that the intrinsic acoustic absorption of GaAs in the temperature range from 80 K to 300 K is dominated by scattering with thermal phonons. At lower temperatures, in contrast, the intrinsic acoustic absorption saturates at a frequency-dependent value. Experiments carried out with different propagation lengths indicate that the saturation is associated with losses during reflection at the sample boundaries. We also demonstrate devices with high quality factor fabricated on top of acoustic Bragg-reflectors. The results presented here prove the feasibility of high-quality acoustic resonators embedding GaAs-based nanostructures, thus opening the way for the modulation and control of their properties by electrically excited SHF LBAWs.

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