钨单晶纳米粒子在高压磁控放电中的热平衡
Thermal balance of tungsten monocrystalline nanoparticles in high pressure magnetron discharges
摘要：
纳米粒子是在溅射磁控管放电操作与钨阴极在30帕的氩气压力。结构分析表明，它们属于核壳型结构。核是主要在亚稳β-钨相的单晶体，并且壳由氧化钨制成。亚稳相的起源归因于器件中残余氧的存在。由于该相通过退火转变为稳定的α-钨相，因此使用纳米颗粒热平衡的标准模型来找到它们在所考虑的实验条件下可以达到的温度。结果表明，这个温度是显着高于气体，但不足以高到转变的单晶亚稳β相在等离子体过程中。
英文摘要：
Nanoparticles are produced in sputtering magnetron discharges operating with a tungsten cathode at 30 Pa argon pressure. Structure analyses show that they are of core-shell type. The core is a monocrystal mainly in the metastable beta-tungsten phase and the shell is made of tungsten oxide. The origin of the metastable phase is attributed to the presence of residual oxygen in the device. Since this phase transforms into the stable alpha-tungsten phase by annealing, a standard model on the thermal balance of nanoparticles was used to find the temperature that they can reach under the considered experimental conditions. It is shown that this temperature is significantly higher than the gas one but not high enough to transform the monocrystalline metastable beta-phase during the plasma process.
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