为任意射频放电仿真框架配备外部集总元件电路的通用方法
A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits
摘要：
连接到射频等离子体放电的外部电路对于将功率传输到放电中是必不可少的，并且因此是等离子体操作的关键元件。然而，许多等离子体模拟简化甚至忽略了外部网络。这是因为需要根据基尔霍夫定律求解电路的辅助微分方程，这可能成为一项繁琐的任务，特别是对于大型电路。这项工作提出了一种方法，它允许包括电路在任何所需的射频等离子体模拟。在概念上，任意复杂的外部网络可以以简单网表的形式并入。建议的方法是基于谐波平衡的概念，它分裂成非线性等离子体和线性电路的贡献整个系统。所施加的电压对每个特定的谐波电流的影响的数学公式是必需的，并提出。它表明，这种方法是适用于简单的全球等离子体模型，以及更复杂的空间分辨粒子在细胞模拟。
英文摘要：
External electric circuits attached to radio-frequency plasma discharges are essential for the power transfer into the discharge and are, therefore, a key element for plasma operation. Many plasma simulations, however, simplify or even neglect the external network. This is because a solution of the circuit's auxiliary differential equations following Kirchhoff's laws is required, which can become a tedious task especially for large circuits. This work proposes a method, which allows to include electric circuits in any desired radio-frequency plasma simulation. Conceptually, arbitrarily complex external networks may be incorporated in the form of a simple netlist. The suggested approach is based on the harmonic balance concept, which splits the whole system into the nonlinear plasma and the linear circuit contribution. A mathematical formulation of the influence of the applied voltage on the current for each specific harmonic is required and proposed. It is demonstrated that this method is applicable for both simple global plasma models as well as more complex spatially resolved Particle-in-Cell simulations.
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