集成共线refractive index传感器和Ge PIN光电二极管
Integrated collinear refractive index sensor with Ge PIN photodiodes
摘要：
折射率传感是一种高灵敏度和无标记的分子结合事件检测方法。基于等离子体共振的生物传感概念的商业实现通常需要大量的外部仪器，例如显微镜和光谱仪。存在基于等离子体纳米结构与用于芯片上集成的光电子器件的直接集成的很少概念。在这里，我们提出了一个CMOS兼容的折射率传感器组成的Ge异质结PIN二极管与等离子体纳米孔阵列直接到二极管铝接触金属化结构的组合。在我们的设备中，光电流可以用来检测表面折射率的变化下，简单的顶部照明和没有信号放大电路的帮助。我们的器件在体折射率传感中表现出每折射率单位> 1000 nm的高灵敏度，可以作为原型，利用CMOS平台的成本效益，实现超紧凑、低成本的生物传感器。
英文摘要：
Refractive index sensing is a highly sensitive and label-free detection method for molecular binding events. Commercial implementations of biosensing concepts based on plasmon resonances typically require significant external instrumentation such as microscopes and spectrometers. Few concepts exist that are based on direct integration of plasmonic nanostructures with optoelectronic devices for on-chip integration. Here, we present a CMOS-compatible refractive index sensor consisting of a Ge heterostructure PIN diode in combination with a plasmonic nanohole array structured directly into the diode Al contact metallization. In our devices, the photocurrent can be used to detect surface refractive index changes under simple top illumination and without the aid of signal amplification circuitry. Our devices exhibit large sensitivities > 1000 nm per refractive index unit in bulk refractive index sensing and could serve as prototypes to leverage the cost-effectiveness of the CMOS platform for ultra-compact, low-cost biosensors.
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