Quantum bits (qubits) with long coherence times are an important element for the implementation of medium- and large-scale quantum computers. In the case of superconducting planar qubits, understanding and improving qubits' quality can be achieved by studying superconducting planar resonators. In this Paper, we fabricate and characterize coplanar waveguide resonators made from aluminum thin films deposited on silicon substrates. We perform three different substrate treatments prior to aluminum deposition: One chemical treatment based on a hydrofluoric acid clean, one physical treatment consisting of a thermal annealing at 880 degree Celsius in high vacuum, one combined treatment comprising both the chemical and the physical treatments. We first characterize the fabricated samples through cross-sectional tunneling electron microscopy acquiring electron energy loss spectroscopy maps of the samples' cross sections. These measurements show that both the chemical and the physical treatments almost entirely remove native silicon oxide from the substrate surface and that their combination results in the cleanest interface. We then study the quality of the resonators by means of microwave measurements in the "quantum regime", i.e., at a temperature T~10 mK and at a mean microwave photon number $\langle n_{\textrm{ph}} \rangle \sim 1$. In this regime, we find that both surface treatments independently improve the resonator's intrinsic quality factor and that the highest quality factor is obtained for the combined treatment, $Q_{\textrm{i}} \sim 0.8$ million. Finally, we find that the TLS quality factor averaged over a time period of 3 h is $\sim 3$ million at $\langle n_{\textrm{ph}} \rangle \sim 10$, indicating that substrate surface engineering can potentially reduce the TLS loss below other losses such as quasiparticle and vortex loss.
In this work, we find that Al cladding on Nb microstrip resonators is an efficient way to suppress nonlinear responses induced by local Joule heating, resulting in improved microwave power handling capability. This improvement is likely due to the proximity effect between the Al and the Nb layers. The proximity effect is found to be controllable by tuning the thickness of the Al layer. We show that improving the film quality is also helpful as it enhances the microwave critical current density, but it cannot eliminate the local heating.
High kinetic inductance materials constitute a valuable resource for superconducting quantum circuits and hybrid architectures. Superconducting granular aluminum (grAl) reaches kinetic sheet inductances in the nH/$\square$ range, with proven applicability in superconducting quantum bits and microwave detectors. Here we show that the single photon internal quality factor $Q_{\mathrm{i}}$ of grAl microwave resonators exceeds $10^5$ in magnetic fields up to 1T, aligned in-plane to the grAl films. Small perpendicular magnetic fields, in the range of 0.5mT, enhance $Q_{\mathrm{i}}$ by approximately…
We have studied superconducting coplanar-waveguide (CPW) resonators fabricated from disordered (granular) films of Aluminum. Very high kinetic inductance of these films, inherent to disordered materials, allows us to implement ultra-short (200 $μ$m at a 5GHz resonance frequency) and high-impedance (up to 5 k$Ω$) half-wavelength resonators. We have shown that the intrinsic losses in these resonators at temperatures $\lesssim 250$ mK are limited by resonator coupling to two-level systems in the environment. The demonstrated internal quality factors are comparable with those for CPW resonators ma…
In situ Al$_2$O$_3$ passivation of epitaxial tantalum and aluminum films enables long-term stability in superconducting microwave resonators
Grad. Institute of Applied Physics and Dept. of Physics, National Taiwan University（国立台湾大学应用物理研究所及物理系）；Department of Physics, National Tsing Hua University（国立清华大学物理系）；National Synchrotron Radiation Research Center（国家同步辐射研究中心）；Taiwan Semiconductor Research Institute（台湾半导体研究院）
The introduction of crystalline defects or dopants can give rise to so-called "dirty superconductors", characterized by reduced coherence length and quasiparticle mean free path. In particular, granular superconductors such as Granular Aluminum (GrAl), consisting of remarkably uniform grains connected by Josephson contacts have attracted interest since the sixties thanks to their rich phase diagram and practical advantages, like increased critical temperature, critical field, and kinetic inductance. Here we report the measurement and modeling of circuit quantum electrodynamics properties of Gr…
In 2007, type-I superconductivity in heavily boron-doped silicon carbide was discovered. The question arose, if it is possible to achieve a superconducting phase by introducing dopants different from boron. Recently, aluminum-doped silicon carbide was successfully found to superconduct by means of resistivity and DC magnetization measurements. In contrast to boron-doped silicon carbide, the aluminum doped system is treated as a type-II superconductor because of the absence of an hysteresis in data measured upon decreasing and increasing temperature in finite magnetic fields. In this paper, res…
Characterization of process-related interfacial dielectric loss in aluminum-on-silicon by resonator microwave measurements, materials analysis, and imaging
We present a method to systematically locate and extract capacitive and inductive losses in superconducting resonators at microwave frequencies by use of mixed-material, lumped element devices. In these devices, ultra-low loss titanium nitride was progressively replaced with aluminum in the inter-digitated capacitor and meandered inductor elements. By measuring the power dependent loss at 50 mK as the Al-TiN fraction in each element is increased, we find that at low electric field, i.e. in the single photon limit, the loss is two level system in nature and is correlated with the amount of Al c…
We present microwave-frequency NbTiN resonators on silicon, systematically achieving internal quality factors above 1 M in the quantum regime. We use two techniques to reduce losses associated with two-level systems: an additional substrate surface treatment prior to NbTiN deposition to optimize the metal-substrate interface, and deep reactive-ion etching of the substrate to displace the substrate-vacuum interfaces away from high electric fields. The temperature and power dependence of resonator behavior indicate that two-level systems still contribute significantly to energy dissipation, sugg…
Three-dimensional microwave cavities have recently been combined with superconducting qubits in the circuit quantum electrodynamics (cQED) architecture. These cavities should have less sensitivity to dielectric and conductor losses at surfaces and interfaces, which currently limit the performance of planar resonators. We expect that significantly (>10^3) higher quality factors and longer lifetimes should be achievable for 3D structures. Motivated by this principle, we have reached internal quality factors greater than 0.5x10^9 and intrinsic lifetimes of 0.01 seconds for multiple aluminum super…
Out of equilibrium quasiparticles (QPs) are one of the main sources of decoherence in superconducting quantum circuits, and are particularly detrimental in devices with high kinetic inductance, such as high impedance resonators, qubits, and detectors. Despite significant progress in the understanding of QP dynamics, pinpointing their origin and decreasing their density remain outstanding tasks. The cyclic process of recombination and generation of QPs implies the exchange of phonons between the superconducting thin film and the underlying substrate. Reducing the number of substrate phonons wit…
We study within a first-principle approach the band structure, vibrational modes and electron-phonon coupling in boron, aluminum and phosphorus doped silicon in the diamond phase. Our results provide evidences that the recently discovered superconducting transition in boron doped cubic silicon can be explained within a standard phonon-mediated mechanism. The importance of lattice compression and dopant related stretching modes are emphasized. We find that T$_C$ can be increased by one order of magnitude by adopting aluminum doping instead of boron.
We present the driven response at T=30mK of 6 GHz superconducting resonators constructed from capacitively-shunted three dimensional (3D) aluminum nanobridge superconducting quantum interference devices (nanoSQUIDs). We observe flux modulation of the resonant frequency in quantitative agreement with numerical calculation and characteristic of near-ideal short weak link junctions. Under strong microwave excitation, we observe stable bifurcation in devices with coupled quality factor (Q) ranging from ~30-3500. Near this bias point, parametric amplification with > 20dB gain, 40 MHz bandwidth, and…
Characterizing superconducting microwave resonators with highly dissipative elements is a technical challenge, but a requirement for implementing and understanding the operation of hybrid quantum devices involving dissipative elements, e.g. for thermal engineering and detection. We present experiments on $λ/4$ superconducting niobium coplanar waveguide (CPW) resonators, terminating at the antinode by a dissipative copper microstrip via aluminum leads, such that the resonator response is difficult to measure in a typical microwave environment. By measuring the transmission both above and below …
We present a method for relieving aluminum 3D transmon qubits from a silicon substrate using micromachining. Our technique is a high yield, one-step deep reactive ion etch that requires no additional fabrication processes, and results in the suspension of the junction area and edges of the aluminum film. The drastic change in the device geometry affects both the dielectric and flux noise environment experienced by the qubit. In particular, the participation ratios of various dielectric interfaces are significantly modified, and suspended qubits exhibited longer $T_1$'s than non-suspended ones.…
Superconducting boron doped silicon is a promising material for integrated silicon quantum devices. In particular, its low electronic density and moderate disorder make it a suitable candidate for the fabrication of large inductances with low losses at microwave frequencies. Here, we study experimentally the electrodynamics of superconducting silicon thin layers patterned in coplanar waveguide resonators, targeting three key properties: kinetic inductance, internal losses, and the variation of these quantities with the read-out power. We report the first observation in a doped semiconductor of…
We study a mechanical resonator made of aluminum near the normal to super conductivity phase transition. A sharp drop in the rate of mechanical damping is observed below the critical temperature. The experimental results are compared with predictions based on the Bardeen Cooper Schrieffer theory of superconductivity and a fair agreement is obtained.
Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen content, microstructure parameter, and bond-angle disorder are negatively correlated with the substrate temperature. All three films have a loss tangent below $10^{-5}$ for a resonator energy of $10^5$ photons, at 120 mK and 4-7 GHz. This makes these film…
We introduce a microwave circuit architecture for quantum signal processing combining design principles borrowed from high-Q 3D resonators in the quantum regime and from planar structures fabricated with standard lithography. The resulting '2.5D' whispering-gallery mode resonators store 98% of their energy in vacuum. We have measured internal quality factors above 3 million at the single photon level and have used the device as a materials characterization platform to place an upper bound on the surface resistance of thin film aluminum of less than 250nOhms.
Superconducting high kinetic inductance elements constitute a valuable resource for quantum circuit design and millimeter-wave detection. Granular aluminum (GrAl) in the superconducting regime is a particularly interesting material since it has already shown a kinetic inductance in the range of nH$/\Box$ and its deposition is compatible with conventional Al/AlOx/Al Josephson junction fabrication. We characterize microwave resonators fabricated from GrAl with a room temperature resistivity of $4 \times 10^3\,μΩ\cdot$cm, which is a factor of 3 below the superconductor to insulator transition, sh…
We observed a strong non-linearity in the system of quasiparticles of a superconducting aluminum resonator, due to the Cooper-pair breaking from the absorbed readout power. We observed both negative and positive feedback effects, controlled by the detuning of the readout frequency, which are able to alter the relaxation time of quasiparticles by a factor greater than 10. We estimate that the (70+/-5) % of the total non-linearity of the device is due to quasiparticles.
We present a technique for increasing the internal quality factor of kinetic inductance detectors (KIDs) by nulling ambient magnetic fields with a properly applied magnetic field. The KIDs used in this study are made from thin-film aluminum, they are mounted inside a light-tight package made from bulk aluminum, and they are operated near $150 \, \mathrm{mK}$. Since the thin-film aluminum has a slightly elevated critical temperature ($T_\mathrm{c} = 1.4 \, \mathrm{K}$), it therefore transitions before the package ($T_\mathrm{c} = 1.2 \, \mathrm{K}$), which also serves as a magnetic shield. On c…
