RF溅射ZnO/Al：ZnO多层膜红外超材料
Infrared metamaterials by RF sputtered ZnO/Al:ZnO multilayers
摘要：
双曲超材料使用悬浮在电介质中的金属线或金属和电介质的交替层来创建人工光学各向异性。本文采用射频磁控溅射技术制备了ZnO/Al：ZnO（AZO）多层膜。我们制作的多层膜满足I型双曲超材料所需的条件。通过角透射率和椭圆偏振光谱测量，单个AZO和ZnO薄膜，以及多层膜的光学响应进行了研究。多层膜系统的光学响应预测使用非局部校正的有效介质近似（EMA）。采用单轴材料模型和EMA模型对多层膜系统的椭偏光谱数据进行了建模。理论和实验研究都证实了多层膜在2.2 μm波长处经历了双曲线转变。
英文摘要：
Hyperbolic metamaterials create artificial optical anisotropy using metallic wires suspended in a dielectric medium, or alternating layers of a metal and dielectric. Here we fabricated ZnO/Al:ZnO (AZO) multilayers by the RF magnetron sputtering deposition technique. Our fabricated multilayers satisfy the conditions required for a type I hyperbolic metamaterial. The optical response of individual AZO and ZnO films, as well as the multilayered film were investigated via angular transmittance and spectroscopic ellipsometry measurements. The optical response of the multilayered system is predicted using the nonlocal-corrected Effective Medium Approximation (EMA). The spectroscopic ellipsometry data of the multilayered system was modeled using a uniaxial material model and EMA model. Both theoretical and experimental studies validate the multilayers undergo a hyperbolic transition at a wavelength of 2.2 μm.
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