Contact Resistance (RC) is a major limiting factor in the performance of graphene devices. RC is sensitive to the quality of the interface and the composition of the contact, which are affected by the graphene transfer process and contact deposition conditions. In this work, a linear correlation is observed between the composition of Ti contacts, characterized by X-ray photoelectron spectroscopy, and the Ti/graphene (Gr) contact resistance measured by the transfer length method. We find that contact composition is tunable via deposition rate and base pressure. Reactor base pressure is found to effect the resultant contact resistance. The effect of contact deposition conditions on thermal transport measured by time-domain thermoreflectance is also reported and interfaces with higher oxide composition appear to result in a lower thermal boundary conductance. Possible origins of this thermal boundary conductance change with oxide composition are discussed.
Transport in Nanoribbon Interconnects Obtained from Graphene Grown by Chemical Vapor Deposition
我们研究了石墨烯纳米管（GNR）的互连从石墨烯化学气相沉积（CVD）生长。我们报告低场和高场的电气测量在很宽的温度范围内，从1.7到900 K。室温迁移率在100至500 cm 2/V/s的范围内，与来自剥离的石墨烯的GNR相当，这表明体缺陷或晶界在小于CVD石墨烯微晶尺寸的器件中几乎不起作用。在高电场下，峰值电流密度受到焦耳加热的限制，但少量的热工程使我们能够达到约2 x 10^9 A/cm 2，这是纳米级CVD石墨烯互连的最高报告。在低于~5 K的温度下，短GNR充当量子点，其尺寸与其长度相当，突出了金属接触在限制传输中的作用。我们的研究说明了CVD生长GNRs的机会，同时揭示了可变性和接触作为未来的挑战。
