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arXiv 1504.04525cond-mat.mes-hallphysics.space-ph
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绝缘体非平衡近界面带电缺陷隧道弛豫的时间和剂量动力学

Temporal and Dose Kinetics of Tunnel Relaxation of Non-Equilibrium Near-Interfacial Charged Defects in Insulators

Gennady I. Zebrev, Maxim G. Drosdetsky

摘要:

本文主要是致力于数学方面的建模和模拟隧道弛豫的非平衡带电氧化物陷阱位于/附近的界面绝缘体导电沟道,例如在辐照MOS器件。隧道退火响应函数的一般形式是从带电缺陷建立和退火的速率方程推导出的,作为具有不同时间常数的不同缺陷的响应的线性叠加。利用这种线性响应函数,分析和讨论了一些重要的实际问题。结合隧道和热或RICN退火,功率一样的时间松弛后,一个单一的离子罢工到栅极氧化层,描述的一般方法的上下文中。

英文摘要:

This paper is devoted mainly to mathematical aspects of modeling and simulation of tunnel relaxation of nonequilibrium charged oxide traps located at/near the interface insulator - conductive channel, for instance in irradiated MOS devices. The generic form of the tunnel annealing response function was derived from the rate equation for the charged defect buildup and annealing as a linear superposition of the responses of different defects with different time constants. Using this linear response function, a number of important practical problems are analyzed and discussed. Combined tunnel and thermal or RICN annealing, power-like temporal relaxation after a single ion strike into the gate oxide, are described in context of general approach.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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