铜基薄浸银层的纳米尺度表征
Nanoscale characterization of thin immersion silver coatings on copper substrates
摘要：
采用自制的无氰碱性硝酸银-硫代硫酸盐溶液和两种市售工业镀液，通过接触还原沉淀法对微电子级铜箔进行浸镀银。随后通过次级中性质谱（SNMS）和辉光放电光发射光谱（GDOES）以纳米级分辨率分析新沉积的银层的浓度深度分布。用30-60 s浸渍时间获得的沉积银层的厚度在50-150 nm的范围内，这取决于浸渍过程的参数。可检测到来自硫代硫酸盐浴的轻微硫污染。在铜基底和银沉积物之间的界面周围也可以观察到痕量的Cr和Na。结果还表明，在空气中特别是在高于环境温度下长时间储存会导致沉积层中的一种老化效应，改变其组成。在自制溶液制备的样品中，可检测到铜及其腐蚀产物的含量增加。
英文摘要：
Microelectronic-grade copper foils were immersion silver plated in a home-made non-cyanide alkaline silver nitrate - thiosulfate solution and in two commercially available industrial baths via contact reductive precipitation. The concentration depth profiles of the freshly deposited silver layers were afterwards analyzed at nanoscale resolution by means of Secondary Neutral Mass Spectrometry (SNMS) and Glow Discharge Optical Emission Spectroscopy (GDOES). The thickness of deposited silver layers obtained with 30-60 s immersion time were in the range of 50-150 nm, depending on the parameters of the immersion procedure. Slight contamination of sulfur from the thiosulfate bath was detectable. Traces of Cr and Na could be observed as well around the interface between the copper substrate and silver deposit. Results also indicate that storage for longer time in air especially at higher than ambient temperatures induces a kind of ageing effect in the deposited layer, changing its composition. In case of samples prepared from home-made solution increasing amounts of copper together with its corrosion products became detectable.
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