通过1,1,1,2-四氟乙烷等离子体浸没离子注入等离子体增强化学气相沉积调控氟化类金刚石碳涂层的表面能
Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane
AI总结：
本文提出利用PIII-PECVD和1,1,1,2-四氟乙烷制备氟掺杂类金刚石碳涂层，实现氟含量高达40%，并证实氟掺入可降低表面能，适用于生物医学和抗污损表面。
摘要：
我们展示了一种环境友好且可扩展的方法，利用1,1,1,2-四氟乙烷的等离子体浸没离子注入等离子体增强化学气相沉积（PIII-PECVD）制备氟掺杂类金刚石碳（F-DLC）涂层。F-DLC薄膜通常具有低润湿性和良好的机械柔韧性，使其适用于生物医学设备和抗生物污损表面。我们报告了氟掺入对这些涂层的表面化学、表面能和形貌的影响，表明我们的方法能有效将F-DLC中的氟含量提高至40%。我们证明氟的添加导致表面能降低，这与表面润湿性的降低一致。
英文摘要：
We demonstrate an environmentally friendly and scalable method to create fluorine-doped diamond-like carbon (F-DLC) coatings using plasma immersion ion implantation plasma-enhanced chemical vapor deposition (PIII-PECVD) with 1,1,1,2-tetrafluoroethane. F-DLC films tend to have low wettability and good mechanical flexibility, which make them suitable for applications in biomedical devices and antibiofouling surfaces. We report on the effects of fluorine incorporation on the surface chemistry, surface energy, and morphology of these coatings, showing that our method is effective in increasing the fluorine content in the F-DLC up to 40%. We show that the addition of fluorine leads to a decrease in surface energy, which is consistent with a reduction in surface wettability.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
