Dispersion engineering in silicon nitride (SiX NY ) waveguides is investigated through the optimization of the waveguide transversal dimensions and refractive indices in a multi-cladding arrangement. Ultra-flat dispersion of -84.0 +/- 0.5 ps/nm/km between 1700 and 2440 nm and 1.5 +/- 3 ps/nm/km between 1670 and 2500 nm is numerically demonstrated. It is shown that typical refractive index fluctuations as well as dimension fluctuations during the fabrication of the SiX NY waveguides are a limitation for obtaining ultra-flat dispersion profiles. Single- and multi-cladding waveguides are fabricated and their dispersion profiles measured (over nearly 1000 nm) using a low-coherence frequency domain interferometric technique. By appropriate thickness optimization, the zero-dispersion wavelength is tuned over a large spectral range in both single-cladding waveguides and multi-cladding waveguides with small refractive index contrast (3 %). A flat dispersion profile with 3.2 ps/nm/km variation over 500 nm is obtained in a multi-cladding waveguide fabricated with a refractive index contrast of 37 %. Finally, we generate a nearly three-octave supercontinuum in this dispersion flattened multi-cladding SiX NY waveguide.
We demonstrate dispersion engineering of integrated silicon nitride based ring resonators through conformal coating with hafnium dioxide deposited on top of the structures via atomic layer deposition (ALD). Both, magnitude and bandwidth of anomalous dispersion can be significantly increased. All results are confirmed by high resolution frequency-comb-assisted-diode-laser spectroscopy and are in very good agreement with the simulated modification of the mode spectrum.
Thermodynamic noise places a fundamental limit on the frequency stability of dielectric optical resonators. Here, we present the characterization of thermo-refractive noise in photonic-chip-based silicon nitride microresonators and show that thermo-refractive noise is the dominant thermal noise source in the platform. We employed balanced homodyne detection to measure the thermo-refractive noise spectrum of microresonators of different diameters. The measurements are in good agreement with theoretical models and finite element method simulations. Our characterization sets quantitative bounds o…
Broadband Chromatic Dispersion of Thermo-refractive Coefficients and its Impact in Silicon Nitride Nonlinear Photonics
Joint Quantum Institute, NIST/University of Maryland（联合量子研究所，美国国家标准与技术研究院/马里兰大学）；Microsystems and Nanotechnology Division, National Institute of Standards and Technology（微系统与纳米技术部，美国国家标准与技术研究院）
Tight confinement of light in photonic cavities provides an efficient template for the realization of high optical intensity with strong field gradients. Here we present such a nanoscale resonator device based on a one-dimensional photonic crystal slot cavity. Our design allows for realizing highly localized optical modes with theoretically predicted Q factors in excess of 106. The design is demonstrated experimentally both in a high-contrast refractive index system (silicon), as well as in medium refractive index contrast devices made from aluminum nitride. We achieve extinction ratio of 21dB…
Portable and cost-effective gas sensors are gaining demand for a number of environmental, biomedical and industrial applications, yet current devices are confined into specialized labs and cannot be extended to general use. Here, we demonstrate a part-per-billion-sensitive refractive index gas sensor on a photonic chip based on silicon nitride waveguides functionalized with a mesoporous silica top-cladding layer. Low-concentration chemical vapors are detected by monitoring the output spectral pattern of an integrated Mach-Zehnder interferometer having one coated arm exposed to the gas vapors. …
The use of the Silicon-on-Insulator (SOI) platform has been prominent for realizing CMOS-compatible, high-performance photonic integrated circuits (PICs). But in recent years, the silicon-nitride-on-silicon-dioxide (SiN-on-SiO$_2$) platform has garnered increasing interest as an alternative to the SOI platform for realizing high-performance PICs. This is because of its several beneficial properties over the SOI platform, such as low optical losses, high thermo-optic stability, broader wavelength transparency range, and high tolerance to fabrication-process variations. However, SiN-on-SiO$_2$ b…
Gallium nitride (GaN) as a wide-band gap material has been widely used in solid-state lighting. Thanks to its high nonlinearity and high refractive index contrast, GaN-on-insulator (GaNOI) is also a promising platform for nonlinear optical applications. Despite its intriguing optical proprieties, nonlinear applications of GaN have rarely been studied due to the relatively high optical loss of GaN waveguides (2 dB/cm). In this letter, we report GaNOI microresonator with intrinsic quality factor over 2 million, corresponding to an optical loss of 0.26 dB/cm. Parametric oscillation threshold powe…
The lack of a bulk second-order nonlinearity (\c{hi}(2)) in silicon nitride (Si3N4) keeps this low-loss, CMOS-compatible platform from key active functions such as Pockels electro-optic (EO) modulation and efficient second harmonic generation (SHG). We demonstrate a successful induction of \c{hi}(2) in Si3N4 through electrical poling with an externally-applied field to align the Si-N bonds. This alignment breaks the centrosymmetry of Si3N4, and enables the bulk \c{hi}(2). The sample is heated to over 500°C to facilitate the poling. The comparison between the EO responses of poled and non-poled…
Aluminum nitride and silicon nitride have recently emerged as important nonlinear optical materials in integrated photonics respectively for their quadratic and cubic optical nonlinearity. A composite aluminum nitride and silicon nitride waveguide structure, if realized, will simultaneously allow highly efficient second and third harmonic generation on the same chip platform and therefore assists 2f-3f self-referenced frequency combs. On-chip third harmonic generation, being a higher order nonlinear optics effect, is more demanding than second harmonic generation due to the large frequency dif…
In order to overcome the challenge of obtaining high modulation depth due to weak graphene-light interaction, a graphene-on-silicon nitride (SiNx) microring resonator based on graphene's gate-tunable optical conductivity is proposed and studied. Geometrical parameters of graphene-on-SiNx waveguide are systematically analyzed and optimized, yielding a loss tunability of 0.04 dB/μm and an effective index variation of 0.0022. We explicitly study the interaction between graphene and a 40-μm-radius microring resonator, where electro-absorptive and electro-refractive modulation are both taken into a…
A photonic crystal nanocavity with a Quality (Q) factor of 2.3 x 10^5, a mode volume of 0.55($λ/n$)^3, and an operating wavelength of 637 nm is designed in a silicon nitride (SiN_x) ridge waveguide with refractive index of 2.0. The effect on the cavity Q factor and mode volume of single diamond nanocrystals of various sizes and locations embedded in the center and on top of the nanocavity is simulated, demonstrating that Q > 2 x 10^5 is achievable for realistic parameters. An analysis of the figures of merit for cavity quantum electrodynamics reveals that strong coupling between an embedded di…
Purely equatorial lasing in spherical liquid crystal polymer microlasers with engineered refractive index gradient
Humboldt Centre for Nano and Biophotonics, Department of Chemistry and Biochemistry, University of Cologne（科隆大学化学与生物化学系纳米与生物光子学洪堡中心）；Department of Sustainable and Bio-inspired Materials, Max Planck Institute of Colloids and Interfaces（马克斯·普朗克胶体与界面研究所可持续与仿生材料部）
The unique material property of silicon carbide (SiC) and the recent demonstration of low-loss SiC-on-insulator integrated photonics platform have attracted considerable research interests for chip-scale photonic and quantum applications. Here, we carry out a thorough investigation of the Kerr nonlinearity among 4H-SiC wafers from several major wafer manufacturers, and reveal for the first time that their Kerr nonlinear refractive index can be significantly different. By eliminating various measurement errors in the four-wave mixing experiment and improving the theoretical modeling for high-in…
The foundry development of integrated photonics has revolutionized today's optical interconnect and datacenters. Over the last decade, we have witnessed the rising of silicon nitride (Si$_3$N$_4$) integrated photonics, which is currently transferring from laboratory research to foundry manufacturing. The development and transition are triggered by the ultimate need of low optical loss offered by Si$_3$N$_4$, which is beyond the reach of silicon and III-V semiconductors. Combined with modest Kerr nonlinearity, tight optical confinement and dispersion engineering, Si$_3$N$_4$ has today become th…
We experimentally demonstrate wide-band (>100 THz) frequency down-conversion of near-infrared (NIR) femtosecond-scale pulses from an Er:fiber laser to the mid-infrared (MIR) using four-wave-mixing (FWM) in photonic-chip silicon-nitride waveguides. The engineered dispersion in the nanophotonic geometry, along with the wide transparency range of silicon nitride, enables large-detuning FWM phase-matching and results in tunable MIR from 2.6-3.6 um on a single chip with 100-pJ-scale pump-pulse energies. Additionally, we observe > 20 dB broadband parametric gain for the NIR pulses when the FWM proce…
We report an invisibility carpet cloak device, which is capable of making an object undetectable by visible light. The cloak is designed using quasi conformal mapping and is fabricated in a silicon nitride waveguide on a specially developed nano-porous silicon oxide substrate with a very low refractive index. The spatial index variation is realized by etching holes of various sizes in the nitride layer at deep subwavelength scale creating a local effective medium index. The fabricated device demonstrates wideband invisibility throughout the visible spectrum with low loss. This silicon nitride …
We propose and demonstrate subwavelength grating (SWG) metamaterial waveguides and ring resonators on a silicon nitride platform for the first time. The SWG waveguide is engineered such that a large overlap of 53% of the Bloch mode with the top cladding material is achieved, demonstrating excellent potential for applications in evanescent field sensing and light amplification. The devices, which have critical dimensions greater than 100 nm, are fabricated using a commercial rapid turn-around silicon nitride prototyping foundry process using electron beam lithography. Experimental characterizat…
Low-loss photonic integrated circuits (PIC) and microresonators have enabled novel applications ranging from narrow-linewidth lasers, microwave photonics, to chip-scale optical frequency combs and quantum frequency conversion. To translate these results into a widespread technology, attaining ultralow optical losses with established foundry manufacturing is critical. Recent advances in fabrication of integrated Si3N4 photonics have shown that ultralow-loss, dispersion-engineered microresonators can be attained at die-level throughput. For emerging nonlinear applications such as integrated trav…
Chemical vapor deposition-based growth techniques allow flexible design of CMOS-compatible materials. Here, we report the deuterated silicon-rich nitride films grown using plasma-enhanced chemical vapor deposition. The linear and nonlinear properties of the films are characterized. We compare the absorption at 1550nm wavelength region for films grown with $SiH_4$ and $SiD_4$, and experimentally confirm that the silicon-rich nitride films grown with $SiD_4$ eliminates Si-H related absorption. Waveguides fabricated on the films are further shown to possess a linear and nonlinear refractive index…
Optical systems with wide field-of-views (FOV) are crucial for many applications such as high performance imaging, optical projection, augmented/virtual reality, and miniaturized medical imaging tools. Typically, aberration-free imaging with a wide FOV is achieved by stacking multiple refractive lenses (as in a "fisheye" lens), adding to the size and weight of the optical system. Single metalenses designed to have a wide FOV have the potential to replace these bulky imaging systems and, moreover, they may be dispersion engineered for spectrally broadband operation. In this paper, we derive a f…
Nanoscale photonic crystal cavity optomechanical devices enable detection of nanomechanical phenomena with a sensitivity sufficient to observe quantum effects. Here we present the design of a one-dimensional air-mode photonic crystal cavity patterned in a silicon nitride nanobeam, and show that it forms the basis for cavity optomechanical split-beam and paddle nanocavity devices useful for force detection and nonlinear quantum sensing. The air-mode of this device is advantageous for optomechanical coupling, while also having ultrahigh optical quality factor $Q_o\sim 10^6$ despite its proximity…
A global trend to miniaturization and multiwavelength performance of nanophotonic devices drives research on novel phenomena, such as bound states in the continuum and Mietronics, as well as the survey for high-refractive index and strongly anisotropic materials and metasurfaces. Hexagonal boron nitride (hBN) is one of promising materials for the future nanophotonics owing to its inherent anisotropy and prospects of high-quality monocrystals growth with atomically flat surface. Here, we present highly accurate optical constants of hBN in the broad wavelength range of 250-1700 nm combining the …
Inverse-Designed High-Q/V Silicon Nitride Photonic Crystal Cavities for Second- and Third-Harmonic Generation
NTT Nanophotonics Center, NTT, Inc.（NTT公司纳米光子学中心）；Basic Research Laboratories, NTT, Inc.（NTT公司基础研究实验室）；International Center for Elementary Particle Physics, University of Tokyo（东京大学国际基本粒子物理中心）；Device Technology Laboratories, NTT, Inc.（NTT公司器件技术实验室）；Institute of Science Tokyo（东京科学大学）
All-dielectric optical metasurfaces with high quality (Q) factors have so far been hampered by the lack of simultaneously lossless and high refractive index (RI) materials over the full visible spectrum. To achieve broad spectral coverage, the use of low-index materials is, in fact, unavoidable due to the inverse correlation between the band-gap energy (and therefore the optical losses) and the RI. However, for Mie resonant photonics, smaller RIs are associated with reduced Q factors and mode volume confinement. In this work, we leverage symmetry-broken bound states in the continuum (BICs) to …
Microresonator frequency combs, or microcombs, have gained wide appeal for their rich nonlinear physics and wide range of applications. Stoichiometric silicon nitride films grown via low-pressure chemical vapor deposition (LPCVD), in particular, are widely used in chip-integrated Kerr microcombs. Critical to such devices is the ability to control the microresonator dispersion, which has contributions from both material refractive index dispersion and geometric confinement. Here, we show that modifications to the LPCVD growth conditions, specifically the ratio of the gaseous precursors, has a s…
Multiple applications of relevance in photonics, such as spectrally efficient coherent communications, microwave synthesis or the calibration of astronomical spectrographs, would benefit from soliton microcombs operating at repetition rates <50GHz. However, attaining soliton microcombs with low repetition rates using photonic integration technologies represents a formidable challenge. Expanding the cavity volume results in a drop of intracavity intensity that can only be offset by an encompassing rise in quality factor. In addition, reducing the footprint of the microresonator on a planar inte…
Si3N4 is an excellent material for applications of nanophotonics at visible wavelengths due to its wide bandgap and moderately large refractive index (n $\approx$ 2.0). We present the fabrication and characterization of Si3N4 photonic crystal nanobeam cavities for coupling to diamond nanocrystals and Nitrogen-Vacancy centers in a cavity QED system. Confocal micro-photoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q ~ 55,000, which is limited by the resolution of our spectrometer. We also demonstrate coarse tuning of cavity resonances across the 600-700nm ran…
Among the wide-bandgap compound semiconductors, gallium nitride is the most widely available material due to its prevalence in the solid state lighting and high-speed/high-power electronics industries. It is now known that GaN is one of only a handful of materials to host color centers that emit quantum light at room temperature. In this paper, we report on a bright color center in a semi-polar gallium nitride substrate, emitting at room temperature in the near-infrared. We show that a hemispherical solid immersion lens, near index matched to the semiconductor, can be used to enhance the photo…
As the optical analogue to integrated electronics, integrated photonics has already found widespread use in data centers in the form of optical interconnects. As global network traffic continues its rapid expansion, the power consumption of such circuits becomes a critical consideration. Electrically tunable devices in photonic integrated circuits contribute significantly to the total power budget, as they traditionally rely on inherently power-consuming phenomena such as the plasma dispersion effect or the thermo-optic effect for operation. Here, we demonstrate ultra-low-power refractive inde…
Refractive Index Dispersion Fingerprinting via Scanning-Free Parallel Multi-Wavelength SPR on a Single Aluminum Film
School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology（大连理工大学光电工程学院）；DUT-BSU Joint Institute, Dalian University of Technology（大连理工大学-莫斯科鲍曼国立技术大学联合学院）；Institute of Energy, Higher School of High Voltage Engineering, Peter the Great St. Petersburg Polytechnic University（彼得大帝圣彼得堡理工大学高等电压工程学院能源研究所）
Mid-infrared optical frequency combs are of significant interest for molecular spectroscopy due to the large absorption of molecular vibrational modes on one hand, and the ability to implement superior comb-based spectroscopic modalities with increased speed, sensitivity and precision on the other hand. Substantial advances in mid-infrared frequency comb generation have been made in recent years based on nonlinear frequency conversion, microresonator Kerr frequency combs, quantum cascade lasers and mode locking regimes. Here we demonstrate a simple, yet effective method for the direct generati…
Refractive-index tomography of opaque tissue from its own backscattered light
Korea University（高丽大学）；École Polytechnique Fédérale de Lausanne（洛桑联邦理工学院）；Korea Electrotechnology Research Institute (KERI)（韩国电子技术研究研究所）；Pusan National University（釜山国立大学）
We theoretically investigate the use of Rayleigh surface acoustic waves (SAWs) for refractive index modulation in optical waveguides consisting of amorphous dielectrics. Considering low-loss Si$_3$N$_4$ waveguides with a standard core cross section of 4.4$\times$0.03 $μ$m$^2$ size, buried 8 $μ$m deep in a SiO$_2$ cladding we compare surface acoustic wave generation in various different geometries via a piezo-active, lead zirconate titanate film placed on top of the surface and driven via an interdigitized transducer (IDT). Using numerical solutions of the acoustic and optical wave equations, w…
The implementation of terahertz (THz) wafer-level metadevices is critical to advance the science for applications including (I) integrated focal plane array which can image for biology and (II) integrated narrowband absorbers for high spectral resolution THz spectroscopy. Substantial progress has been made in the development of THz metamaterials; however, a wafer-level low-stress THz metadevices platform remains a challenge. This paper experimentally demonstrates a substrate-free THz metadevices platform adopting engineered Si-rich and low-stress silicon nitride (SiNx) thin films, achieving an…
A two-dimensional optical-phased array is demonstrated by using a multiple-input star coupler, compatible with FMCW LiDAR. Previous approach using a single-input design achieves two-dimensional beam-steering by relying on a tunable laser source, taking advantage of grating coupler radiation angle wavelength dependance and variation of the waveguide refractive index. While implementing a convenient way to distribute power in a single step, star coupler architecture is inefficient in terms of employed waveguide length and thus, optical loss and footprint. Multi-input approach partially alleviate…
The index of refraction governs the flow of light through materials. At visible and near infrared wavelengths the real part of the refractive index is limited to less than 3 for naturally occurring transparent materials, fundamentally restricting applications. Here, we carried out experiments to study the upper limit of the effective refractive index of self-assembled metasurfaces at visible and near-infrared wavelengths. The centimeter-scale metasurfaces were made of a hexagonally close packed (hcp) monolayer of gold nanospheres coated with tunable alkanethiol ligand shells, controlling the i…
