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arXiv 1409.6401cond-mat.mes-hall
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有机单层改性金属氧化物半导体器件的高温应用研究

Study Of Organic Monolayer Modified Metal Oxide Semiconductor Devices For High Temperature Applications

Rosilin George, U. Satheesh, J. Cyril Robinson Azariah, D. Devaprakasam

摘要:

本文报道了一种基于有机单层膜的金属氧化物半导体(MOS)器件的制备和特性。在MOS结构中,我们使用1H,1H,2 H,2 H-全氟辛基三氯硅烷(FOTS)自组装单层作为替代。MOS器件的制作工艺简单,采用溅射沉积和浸涂法。该器件在不同温度下进行热处理,以了解其高温应用的性能和效率。将MOS器件加热到150° C、350°C和550°C,发现能带隙分别在2.5eV、3.0eV和3.4eV的量级上变化。对于未加热的样品,能带隙为3.4 eV。结果表明,热处理后,样品的电荷迁移率(μ)、能带隙、电阻等参数均有所降低。由于热处理引起的能带隙的变化显著地影响了I-V和阻抗特性。我们观察到MOS器件在1V到3V之间开始导通,进一步器件导通直到20 V。阻抗分析表明,加热至350 °C的器械显示出低阻抗,但阻抗开始增加,以进一步加热至550°C。利用多介质能带图程序(MEBDP)研究了器件的MOS结构、C-V特性和温度特性(100 ~ 600 K)。我们的实验工作和模拟研究证实,FOTS SAM替代MOS器件可用于高温应用。模拟结果很好地支持了实验观察。研究表明,FOTS有机单层膜有望取代SiO2氧化层应用于MOS和MOSFET的高温应用。

英文摘要:

We report fabrication and characteristics of an organic monolayer based Metal Oxide Semiconductor (MOS) device. In place of SiO2 oxide layer in the MOS configuration, we used 1H, 1H, 2H, 2H- perfluorooctyl trichlorosilane (FOTS) self-assembled monolayer as a substitution. The MOS device was fabricated by simple steps like sputter deposition and dip coating method. The device was heat treated to different temperatures to understand its performance and efficiency for high temperature application. The MOS device was heated to 150° C, 350°C and 550°C and the energy band gap was found to be varied in the order 2.5 eV, 3.0 eV and 3.4eV respectively. For non-heated sample, the energy band gap is 3.4 eV. The results shows that the parameters like charge mobility (μ), energy band gap, and resistance were found to be decreased after the heat treatment. The change in the energy band gap due to heat treatment has significantly influenced the I-V and the impedance characteristics. We observed that the MOS device started to conduct between 1V to 3V, further the device conduct till 20V. Impedance analysis show that device heated to 350 °C shows the low impedance but the impedance starts to increase for further heating up to 550°C. Using Multi Dielectric Energy Band Diagram Program (MEBDP) we studied the MOS structure and C-V characteristics and temperature dependent behavior of the devices from 100K to 600K. Our experimental work and simulation studies confirm that the FOTS SAM substituted MOS device could be used for high temperature applications. The experimental observations are well supported by the simulation results. This study shows that the FOTS organic monolayer are promising substitute for SiO2 oxide layer in the MOS and MOSFET which could be used high temperature applications.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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