单晶金刚石纳米梁的动态驱动
Dynamic Actuation of Single-Crystal Diamond Nanobeams
摘要：
我们展示了单晶金刚石纳米机械器件的介电泳驱动。梯度射频电磁力用于实现悬臂梁和双夹持梁结构的致动，操作频率范围从几MHz到~ 50 MHz。频率调谐和参数驱动也进行了研究。
英文摘要：
We show the dielectrophoretic actuation of single-crystal diamond nanomechanical devices. Gradient radio-frequency electromagnetic forces are used to achieve actuation of both cantilever and doubly clamped beam structures, with operation frequencies ranging from a few MHz to ~50MHz. Frequency tuning and parametric actuation are also studied.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
