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arXiv 0710.2613cond-mat.mes-hallcond-mat.mtrl-sci
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纳米机械金刚石谐振器中的高品质因数千兆赫频率

High quality factor gigahertz frequencies in nanomechanical diamond resonators

Alexei Gaidarzhy, Matthias Imboden, Pritiraj Mohanty, Janet Rankin, Brian W. Sheldon

摘要:

我们报告驱动和检测千兆赫兹范围内的纳米晶体金刚石机械谐振器的谐振频率。高阶横向振动模式的测量在耦合梁谐振器表现出的频率高达1.441 GHz。谐振器的微悬臂阵列设计将微米长悬臂元件的千兆赫兹范围的谐振运动转换为中心支撑结构的位移。与单晶硅相比,纳米晶体金刚石的使用进一步将频率增加三倍。通常与微米级直光束相关的高箝位损耗在我们的谐振器的周期性几何形状中得到抑制,从而允许在500 MHz以上超过20,000的高品质因数。

英文摘要:

We report actuation and detection of gigahertz-range resonance frequencies in nano-crystalline diamond mechanical resonators. High order transverse vibration modes are measured in coupled-beam resonators exhibiting frequencies up to 1.441 GHz. The cantilever-array design of the resonators translates the gigahertz-range resonant motion of micron-long cantilever elements to the displacement of the central supporting structure. Use of nano-crystalline diamond further increases the frequency compared to single crystal silicon by a factor of three. High clamping losses usually associated with micron-sized straight beams are suppressed in the periodic geometry of our resonators, allowing for high quality factors exceeding 20,000 above 500 MHz.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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