500 MHz超导腔体的SINAP表面制备工艺
SINAP surface preparation processing for 500MHz superconducting cavity
摘要：
本文介绍了上海应用物理研究所500MHz超导腔表面处理系统的设计、制作和实验结果。建立了一套无尘室、缓冲化学抛光设备、高压超纯水冲洗设备。整个表面制备过程已成功运行，并通过500MHz单电池超导腔的垂直测试得到了成功的验证。
英文摘要：
This paper illustrates the design, fabrication and experiment results of surface preparation system for 500MHz superconducting cavity at Shanghai Institute of Applied Physic (SINAP). The SINAP established a set of clean room, buffered chemical polishing equipment, and high pressure ultra-pure water rinsing facility. The whole surface preparation procedure has been operated successfully and verified by the successful vertical tests of 500MHz single cell superconducting cavity.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
