设计椭圆氧化物孔制备极化简并微柱
Polarization degenerate micropillars fabricated by designing elliptical oxide apertures
摘要：
介绍了一种制作极化简并氧化物多孔微柱腔的方法。微柱被蚀刻，使得氧化物前部的尺寸和形状被控制。在圆形微柱腔中由于原生和应变诱导的双折射而引起的偏振分裂可以通过在[110]方向上拉长氧化物前沿来补偿，从而减小在该方向上的应力。利用这种技术我们制作了一个品质因数为1.7*？10^4和2.7 u？m3，使计算的最大Purcell因子为11。
英文摘要：
A method for fabrication of polarization degenerate oxide apertured micropillar cavities is demon- strated. Micropillars are etched such that the size and shape of the oxide front is controlled. The polarization splitting in the circular micropillar cavities due to the native and strain induced bire- fringence can be compensated by elongating the oxide front in the [110] direction, thereby reducing stress in this direction. By using this technique we fabricate a polarization degenerate cavity with a quality factor of 1.7*?10^4 and a mode volume of 2.7 u?m3, enabling a calculated maximum Purcell factor of 11.
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