具有少模弹道热隔离的过渡边缘传感器
Transition Edge Sensors with Few-Mode Ballistic Thermal Isolation
摘要：
我们已经制造了过渡边缘传感器（TES），其热特性完全由少模弹道声子交换与热浴的特点。这些TES具有非常小的非晶SiNx支撑腿：0.2 μ m厚，0.7至1.0 μ m宽和1.0至4.0 μ m长。我们表明，使用经典的弹性波理论，它是只需要知道的几何形状和体弹性常数的材料来计算的热导和波动噪声。我们的设备工作在少模式制度，每腿之间的5和7模式，并具有噪声等效功率（NEPs）为1.2 aW Hz-1/2。NEP主要由腿中的热涨落噪声控制，而腿中的热涨落噪声本身主要由声子散粒噪声控制。因此，已经证明了TES的热特性可以通过弹性噪声波模型完全解释。我们目前的设备，和第二代设备的基础上图案化的声子滤波器，可用于生产光学紧凑，机械坚固，高灵敏度的TES成像阵列，规避了许多固有的问题，在传统的长腿设计。
英文摘要：
We have fabricated Transition Edge Sensors (TESs) whose thermal characteristics are completely characterised by few-mode ballistic phonon exchange with the heat bath. These TESs have extremely small amorphous SiNx support legs: 0.2 um thick, 0.7 to 1.0 um wide and 1.0 to 4.0 um long. We show, using classical elastic wave theory, that it is only necessary to know the geometry and bulk elastic constants of the material to calculate the thermal conductance and fluctuation noise. Our devices operate in the few-mode regime, between 5 and 7 modes per leg, and have noise equivalent powers (NEPs) of 1.2 aW Hz-1/2. The NEP is dominated by the thermal fluctuation noise in the legs, which itself is dominated by phonon shot-noise. Thus TESs have been demonstrated whose thermal characteristics are fully accounted for by an elastic noise-wave model. Our current devices, and second-generation devices based on patterned phononic filters, can be used to produce optically compact, mechanically robust, highly sensitive TES imaging arrays, circumventing many of the problems inherent in conventional long-legged designs.
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