印度第一个交流耦合硅微带传感器的设计、制造和表征
Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India
摘要：
本文报道的设计，制造和表征的单面硅微带传感器与集成偏置电阻和耦合电容器，在印度首次生产。我们首先在一个四英寸的晶片上开发了一个原型传感器。在找到合适的测试程序来表征这些交流耦合传感器后，我们对各种工艺参数进行了微调，以生产具有所需规格的传感器。
英文摘要：
This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor on a four-inch wafer. After finding suitable test procedures for characterizing these AC coupled sensors, we have fine-tuned various process parameters in order to produce sensors with the desired specifications.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
