通过溅射阴极材料估算材料注入反射放电的效率
Estimation of the Efficiency of Material Injection into the Reflex Discharge by Sputtering the Cathode Material
摘要:
在稠密气体-金属等离子体形成的初始阶段,考虑了将一种被电离的工作物质注入到脉冲反射放电等离子体中的过程。提出了一个计算模型,以估计所需的工作材料注入放电的溅射机制的参数。所得数据与实验结果吻合较好。
英文摘要:
The processes of injection of a sputtered-and-ionized working material into the pulsed reflex discharge plasma have been considered at the initial stage of dense gas-metal plasma formation. A calculation model has been proposed to estimate the parameters of the sputtering mechanism for the required working material to be injected into the discharge. The data obtained are in good accordance with experimental results.
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