使用光电润湿的微机电系统的“远距离致动”：概念验证
"Actuation at a distance" of microelectromechanical systems using photoelectrowetting: proof-of-concept
摘要：
我们在这里展示了一个概念验证实验，微机电系统（MEMS）可以使用光电润湿致动。为了证明这一点，30 μm厚的铝悬臂使用普通的白光源驱动。使用等于\approx 1000 W m-2的光辐照度在7 V的偏压下观察到56 μm的偏转。悬臂的偏转依赖于最近观察到的光电润湿效应[Sci. 1，184（2011）]。这种“远距离致动”对于自主无线传感器、MEMS和微系统的光学寻址和控制可能很有用。
英文摘要：
We demonstrate here a proof-of-concept experiment that microelectromechanical systems (MEMS) can be actuated using photoelectrowetting. In order to demonstrate this, a 30 μm thick aluminum cantilever is actuated using an ordinary white light source. A deflection of 56 μm is observed using a light irradiance equal to \approx 1000 W m-2 at a bias of 7 V. The deflection of the cantilever relies on the recently observed photoelectrowetting effect [Sci. Rep.1, 184 (2011)]. Such "actuation at a distance" could be useful for optical addressing and control of autonomous wireless sensors, MEMS and microsystems.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
