用光移动液体：半导体上的光电润湿
Moving liquids with light: Photoelectrowetting on semiconductors
摘要：
基于微芯片的系统中的液体传输在许多领域中是重要的，例如芯片上的自动化、微流体和光流体。在这样的系统中，液体的驱动通常使用机械位移11或通过能量转换来实现，例如改变润湿的电润湿。然而，目前还没有明确的方法来利用光驱动液体。本文将半导体物理和润湿现象联系起来，提出了一种全新的效应--在下面的半导体的空间电荷区域中的载流子的光学生成改变绝缘体-半导体堆叠的电容;其结果是在照射时液滴的润湿接触角的修改。使用商业硅晶片来证明该效果，所述商业硅晶片具有跨越四个数量级的掺杂范围（6 \times 1014 - 8 \times 1018 cm-3）的n型和p型，涂覆有商业含氟聚合物绝缘膜（Teflon \textregistered）。阻抗测量证实，观察到的半导体空间电荷相关的影响。这项工作的影响可能会导致上述领域的新硅基技术。
英文摘要：
Liquid transport in microchip-based systems is important in many areas such as Laboratory-on-a-chip, Microfluidics and Optofluidics. Actuation of liquids in such systems is usually achieved using either mechanical displacement11 or via energy conversion e.g. electrowetting which modifies wetting. However, at the moment there is no clear way of actuating a liquid using light. Here, by linking semiconductor physics and wetting phenomenon a brand new effect "photoelectrowetting" is demonstrated for a droplet of conducting liquid resting on an insulator-semiconductor stack. Optical generation of carriers in the space-charge region of the underlying semiconductor alters the capacitance of the insulator-semiconductor stack; the result of this is a modification of the wetting contact angle of the droplet upon illumination. The effect is demonstrated using commercial silicon wafers, both n- and p-type having a doping range spanning four orders of magnitude (6\times1014-8\times1018 cm-3), coated with a commercial fluoropolymer insulating film (Teflon\textregistered). Impedance measurements confirm that the observations are semiconductor space-charge related effects. The impact of the work could lead to new silicon-based technologies in the above mentioned areas.
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