从多层膜蚀刻悬浮超导混合结
Etching suspended superconducting hybrid junctions from a multilayer
摘要：
提出了一种制备大面积超导混合隧道结的新方法。样品是用光刻和化学腐蚀相结合的方法制备的超导体-绝缘体-正常金属多层膜。该工艺涉及的制造步骤少，可靠，并产生极高质量的隧道结。在适当的偏置电压下，显示出显著的电子冷却。
英文摘要：
A novel method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor - insulator - normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
