钼铼超导悬浮纳米结构
Molybdenum-Rhenium superconducting suspended nanostructures
摘要：
悬浮的超导纳米结构的MoRe $50\%/50\%$重量的制造采用常用的制造步骤在微米和纳米尺度的设备，然后通过湿蚀刻与氢氯酸的SiO $_2$牺牲层。与$50\,\rm{nm}$一样窄且长度为$3\,\rm{μm}$的悬浮超导沟道具有$\approx 6.5\,\rm{K}$的临界温度，其可以在$400\,^{\circ}\mathrm{C}$下退火时通过$0.5\rm{K}$而增加。详细研究了不同沟道宽度的器件在退火过程中的超导临界电流和临界温度的变化，发现杂质的脱附是提高超导性能的原因。这些发现为使用标准制造技术开发超导机电设备铺平了道路。
英文摘要：
Suspended superconducting nanostructures of MoRe $50\%/50\%$ by weight are fabricated employing commonly used fabrication steps in micro- and nano-meter scale devices followed by wet-etching with Hydro-fluoric acid of a SiO$_2$ sacrificial layer. Suspended superconducting channels as narrow as $50\,\rm{nm}$ and length $3\,\rm{μm}$ have a critical temperature of $\approx 6.5\,\rm{K}$, which can increase by $0.5\rm{K}$ upon annealing at $400\,^{\circ}\mathrm{C}$. A detailed study of the dependence of the superconducting critical current and critical temperature upon annealing and in devices with different channel width reveals that desorption of contaminants is responsible for the improved superconducting properties. These findings pave the way for the development of superconducting electromechanical devices using standard fabrication techniques.
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