曲面椭偏测量数据的分析
Analysis of ellipsometric data obtained from curved surfaces
摘要：
本文讨论了椭圆偏振测量在曲面上测量时，包括非准直光束的影响所引起的定量误差分析。基于几何光学和波动光学相结合的数值模型仅限于在具有复折射率的衬底上沉积单个介质层的例子。三种方法平均可测量的椭偏数据进行了比较。
英文摘要：
This article deals with quantitative error analysis resulting from ellipsometric data obtained from measurement on curved surfaces including the influence of non-collimated beams. Numerical model based on the combination of geometrical and wave optics is restricted to the example of single dielectric layer deposited on the substrate with complex index of refraction. Three methods for averaging measurable ellipsometric data are compared.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
