了解微等离子体
Understanding Microplasmas
摘要：
微等离子体在大气压下工作，表现出明显的非平衡特性，即它们拥有高能电子，而离子和中性粒子保持低温。由于其巨大的应用潜力，例如在生物医学，表面改性和光源领域，仅举几例，它们已经获得了极大的兴趣。许多不同的配置正在使用中。要在应用方面取得进一步进展，就必须了解这些因素并将其量化。我们报告的最新进展，在诊断和模拟的整个微等离子体系统从气体引入，通过等离子体放电的样品在一个等离子体射流在He/O2在周围空气环境中操作的例子。
英文摘要：
Microplasmas are operated around atmospheric pressure exhibiting pronounced non-equilibrium characteristics, i.e. they possess energetic electrons while ions and neutrals remain cold. They have gained significant interest due to their enormous application potential e.g. in the biomedical, surface modification and light source areas, just to name a few. Many different configurations are in use. Their understanding and quantification is mandatory for further progress in applications. We report on recent progress in the diagnostics and simulation of the entire microplasma system from gas introduction, via the plasma discharge up to the samples at the example of a plasma jet operated in He/O2 in an ambient air environment.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
