残余应力对静电驱动纳米梁静动态特性的影响
Effects of Residual Stress on Static and Dynamic Characteristics of an Electrostatically Actuated Nanobeam
摘要：
静电驱动的纳米管和纳米线在纳米开关、超灵敏传感器和信号处理元件等方面有着广泛的应用前景。这些装置可以被建模为具有圆形横截面的细长梁。本文研究了残余应力对圆柱形纳米梁静动态特性的影响。采用基于Galerkin的多模态降阶模型技术求解控制微分方程。为了验证计算结果，用配点法对方程进行了数值求解。研究了高阶模态对降阶模型的影响。分析表明，残余应力对纳米梁的静动态特性有显著影响。特别是，结果表明，谐振频率的可调谐性显着增加的压缩残余应力的存在下。此外，还探讨了纳米梁谐振器在温度变化下固有的谐振频率稳定性机制。
英文摘要：
Electrostatically actuated nanotubes and nanowires have many promising applications as nano-switches, ultra sensitive sensors and signal processing elements. These devices can be modelled as slender beams with circular cross-section. In this paper, effects of residual stress on static and dynamic characteristics of a cylindrical nanobeam are presented. Galerkin based multi-modal reduced order model technique has been used to solve the governing differential equation. The equation has also been solved numerically by collocation method for verification of the results. The effects of higher modes in reduced order modelling have been investigated. The analysis shows that the residual stress significantly influence the static and dynamic characteristics of the nanobeam. In particular, the results show that resonating frequency tunability increases significantly under the presence of compressive residual stress. In addition, an inherent resonating frequency stability mechanism under temperature variation in nanobeam resonators has also been explored.
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