室温下静电驱动的硅基纳米机械开关
Electrostatically actuated silicon-based nanomechanical switch at room temperature
摘要：
我们展示了一种硅基高频纳米机械器件，能够在室温下可控地在两种状态之间切换。该设备使用了纳米机械谐振器，在滞后非线性制度中具有两个不同的状态。与以前的工作相比，我们证明了室温下的静电驱动和传感的开关器件与100%的保真度通过相位调制的驱动信号。这种相位调制器件可以用作与硅电路集成在片上的低功耗高速机械开关。
英文摘要：
We demonstrate a silicon-based high frequency nanomechanical device capable of switching controllably between two states at room temperature. The device uses a nanomechanical resonator with two distinct states in the hysteretic nonlinear regime. In contrast to prior work, we demonstrate room temperature electrostatic actuation and sensing of the switching device with 100% fidelity by phase modulating the drive signal. This phase-modulated device can be used as a low-power high-speed mechanical switch integrated on-chip with silicon circuitry.
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