聚焦电子束诱导Cu（C5HF6O2）2柱状沉积物力学性能的剂量和能量依赖性
Dose and energy dependence of mechanical properties of focused electron beam induced pillar deposits from Cu(C5HF6O2)2
摘要：
在扫描电子显微镜内进行的弯曲和振动测试被用来机械地表征由聚焦电子束（FEB）诱导的沉积从前体Cu（C5 HF 6 O2）2生长的高纵横比柱。在有限元（FE）分析的支持下，杨氏模量通过使用基于MEMS的力传感的载荷-挠度测量确定，材料密度通过附加的共振振动分析确定。柱材料由碳质（含C、O、F、H）基质组成，其嵌入5. 10原子%的Cu沉积在5 keV和20 keV的初级电子能量和100 pA的束流，这取决于初级电子能量。FEB沉积物的杨氏模量随着电子剂量的增加从17+/-6 GPa增加到25+/-8 GPa。碳质基质的密度显示出对初级电子能量的依赖性：1.2+/-0.3 g cm-3（5 keV）和2.2+/-0.5 g cm-3（20 keV）。在给定的初始能量下，发现与辐照剂量的相关性。由柱基振动模式共振时的相位关系确定的品质因数在150至600的范围内，并且与沉积的辐照能量相关。
英文摘要：
Bending and vibration tests performed inside the scanning electron microscope were used to mechanically characterize high-aspect pillars grown by focused electron-beam (FEB) induced deposition from the precursor Cu(C5HF6O2)2. Supported by finite element (FE) analysis the Young's modulus was determined from load-deflection measurements using cantilever-based force sensing and the material density from additional resonance vibration analysis. The pillar material consisted of a carbonaceous (C, O, F, H containing) matrix which embeds 5...10 at. % Cu deposited at 5 keV and 20 keV primary electron energy and 100 pA beam current, depending on primary electron energy. Young's moduli of the FEB deposits increased from 17+/-6 GPa to 25+/-8 GPa with increasing electron dose. The density of the carbonaceous matrix shows a dependence on the primary electron energy: 1.2+/-0.3 g cm-3 (5 keV) and 2.2+/-0.5 g cm-3 (20 keV). At a given primary energy a correlation with the irradiation dose is found. Quality factors determined from the phase relation at resonance of the fundamental pillar vibration mode were in the range of 150 to 600 and correlated to the deposited irradiation energy.
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