We investigate the role of electrothermal feedback in the operation of superconducting nanowire single-photon detectors (SNSPDs). It is found that the desired mode of operation for SNSPDs is only achieved if this feedback is unstable, which happens naturally through the slow electrical response associated with their relatively large kinetic inductance. If this response is sped up in an effort to increase the device count rate, the electrothermal feedback becomes stable and results in an effect known as latching, where the device is locked in a resistive state and can no longer detect photons. We present a set of experiments which elucidate this effect, and a simple model which quantitatively explains the results.
Nanoscale electrothermal-switch superconducting diode for electrically programmable superconducting circuits
Nanjing University（南京大学）；Purple Mountain Laboratories（紫金山实验室）；Zhejiang University（浙江大学）；Nanjing University of Science and Technology（南京理工大学）；State Key Laboratory of Spintronics Devices and Technologies, Nanjing University（南京大学自旋电子学器件与技术国家重点实验室）
We demonstrate strong negative electrothermal feedback accelerating and linearizing the response of a thermal kinetic inductance detector (TKID). TKIDs are a proposed highly multiplexable replacement to transition-edge sensors and measure power through the temperature-dependent resonant frequency of a superconducting microresonator bolometer. At high readout probe power and probe frequency detuned from the TKID resonant frequency, we observe electrothermal feedback loop gain up to $\mathcal L$ $\approx$ 16 through measuring the reduction of settling time. We also show that the detector respons…
Identification and electrothermal modeling of persistent current switch operating regimes in a Siemens MRI magnet using external electrical measurements
Properties of superconducting nanowires set the performance level for Superconducting Nanowire Single Photon Detectors (SNSPD). Reset time in commonly employed large area SNSPDs,5-10ns,is known to be limited by the nanowires kinetic inductance.On the other hand, reduction of the kinetic inductance in small area (waveguide integrated) SNSPDs prevents biasing them close to the critical current due to latching into a permanent resistive state.In order to reduce the reset time in SNSPDs, superconducting nanowires with both low kinetic inductance and fast electron energy relaxation are required. In…
We demonstrate a 16-pixel array of radio-frequency superconducting nanowire single-photon detectors with an integrated and scalable frequency-division multiplexing architecture, reducing the required bias and readout lines to a single microwave feed line. The electrical behavior of the photon-sensitive nanowires, embedded in a resonant circuit, as well as the optical performance and timing jitter of the single detectors is discussed. Besides the single pixel measurements we also demonstrate the operation of the 16-pixel array with a temporal, spatial and photon-number resolution.
We investigate the performance of superconducting nanowire photon detectors fabricated from ultra-thin Nb. A direct comparison is made between these detectors and similar nanowire detectors fabricated from NbN. We find that Nb detectors are significantly more susceptible than NbN to thermal instability (latching) at high bias. We show that the devices can be stabilized by reducing the input resistance of the readout. Nb detectors optimized in this way are shown to have approximately 2/3 the reset time of similar large-active-area NbN detectors of the same geometry, with approximately 6% detect…
We analyze the effect of different types of fluctuations in internal electron energy on the rates of dark and photon counts in straight current-carrying superconducting nanowires. Dark counts appear due to thermal fluctuations in statistically independent cells with the effective size of the order of the coherence length; each count corresponds to an escape from the equilibrium state through an appropriate saddle point. For photon counts, spectral broadening of the deterministic cut off in the spectra of the detection efficiency can be phenomenologically explained by local thermal fluctuations…
We studied timing jitter in the appearance of photon counts in meandering nanowires with different fractional amount of bends. Timing jitter, which is the probability density of the random time delay between photon absorption in current-carrying superconducting nanowire and appearance of the normal domain, reveals two different underlying physical scenarios. In the deterministic regime, which is realized at large currents and photon energies, jitter is controlled by position dependent detection threshold in straight parts of meanders and decreases with the current. At small photon energies, ji…
We have experimentally compared the critical current, dark count rate and photo-response of 100nm wide superconducting nanowires with different bend designs. Enhanced critical current for nanowires with optimally rounded bends, and thus with no current crowding, are observed. Furthermore, we find that the optimally designed bend significantly reduces the dark counts without compromising the photo-response of the device. The results can lead to major improvements in superconducting nanowire single photon detectors.
We present a novel design of a superconducting nanowire single photon detector (SNSPD) fabricated on a core of a single mode optical fiber. The proposed design allows high overlap between the fiber light mode and the detector, and consequently, our fabricated devices can remain small in dimension and maintain speed of operation, without scarifying the detection efficiency. The on-fiber fabrication method is detailed, together with experimental results. The proposed method can be exploited in the future for the fabrication of other fiber coupled devices.
We present the preparation and measurements of nanowires of single-crystal NbSe$_2$. These nanowires were prepared on ultrathin ($\lesssim10\text{ nm}$) flakes of NbSe$_2$ mechanically exfoliated from a bulk single crystal using a process combining electron beam lithography and reactive plasma etching. The electrical contacts to the nanowires were prepared using Ti/Au. Our technique, which overcomes several limitations of methods developed previously for fabricating superconducting nanowires, also allows for the preparation of complex superconducting nanostructures with a desired geometry. Cur…
We report on magnetoresistance oscillations in superconducting NbNx nanowires synthesized through ammonia gas annealing of NbSe3 precursor nanostructures. Even though the transverse dimensions of the nanowires are much larger than the superconducting coherence length, the voltage-current characteristics of these nanowires at low temperatures are reminiscent of one-dimensional superconductors where quantum phase slips are associated with the origin of dissipation. We show that both the magnetoresistance oscillations and voltage-current characteristics observed in this work result from the granu…
A superconducting thin film with uniform properties is the key to realize nanowire superconducting single-photon detectors (SSPDs) with high performance and high yield. To investigate the uniformity of NbN films, we introduce and characterize simple detectors consisting of short nanowires with length ranging from 100nm to 15μm. Our nanowires, contrary to meander SSPDs, allow probing the homogeneity of NbN at the nanoscale. Experimental results, endorsed by a microscopic model, show the strongly inhomogeneous nature of NbN films on the sub-100nm scale.
The emergence of superconductivity-induced phase-controlled forces in the (0.01-0.1) nN range, and of magnetization oscillations, in nanowire junctions, is discussed. A giant magnetic response to applied weak magnetic fields, is predicted in the ballistic Josephson junction formed by a superconducting tip and a surface, bridged by a normal metal nanowire where Andreev states form.
Superconducting nanowire single-photon detectors (SNSPDs) have an absolute advantage over other types of single photon detectors except the low operating temperature. Therefore, many efforts have been devoted to find high-temperature superconducting materials that are suitable for preparing SNSPDs. Copper-based and MgB2 ultra-thin superconducting nanowires have been already reported. However, the transport properties of iron-based ultra-thin superconducting nanowires have not been studied. In this work, a 10 nm thick 200 nm wide 30 μm long high quality superconducting nanowire was fabricated f…
We have fabricated disordered superconducting nanowires of molybdenium silicide. A molybdenium nanowire is first deposited on top of silicon, and the alloy is formed by rapid thermal annealing. The method allows tuning of the crystal growth to optimise, e.g., the resistivity of the alloy for potential applications in quantum phase slip devices and superconducting nanowire single-photon detectors. The wires have effective diameters from 42 to 79 nm, enabling the observation of crossover from conventional superconductivity to regimes affected by thermal and quantum fluctuations. In the smallest …
We present a stable and high-performance fiber-coupled NbTiN superconducting nanowire avalanche photon detector (SNAP). We demonstrate afterpulse-free operation in serially connected two SNAPs (SC-2SNAP), even in the absence of a choke inductor, achieving a 7.7 times faster response speed than standard SSPDs. The SC-2SNAP device showed a system detection efficiency (SDE) of 81.0% with wide bias current margin, a dark count rate of 6.8 counts/s, and full width at half maximum timing jitter of 68 ps, operating at 2.3 K.
The superconducting nanowire single-photon detector (SNSPD) is a quantum-limit superconducting optical detector based on the Cooper-pair breaking effect by a single photon, which exhibits a higher detection efficiency, lower dark count rate, higher counting rate, and lower timing jitter when compared with those exhibited by its counterparts. SNSPDs have been extensively applied in quantum information processing, including quantum key distribution and optical quantum computation. In this review, we present the requirements of single-photon detectors from quantum information, as well as the prin…
Superconducting nanowires can be synthesised in high-throughput chemical routes and hold great promise as a low-dissipative material for superconducting devices. The applicability of superconducting nanowires, however, has been limited due to the lack of an adequate method to fit the nanowires into given electronic circuits. One of the biggest obstacles is to connect metal terminals to superconducting nanowires in order to establish electric contacts. One attractive method to surmount this difficulty is to synthesise superconducting nanowires directly upon metal terminals such that the nanowir…
Recent progress in the development of superconducting nanowire single-photon detectors (SNSPDs) made of amorphous material has delivered excellent performances, and has had a great impact on a range of research fields. Despite showing the highest system detection efficiency (SDE) ever reported with SNSPDs, amorphous materials typically lead to lower critical currents, which impacts on their jitter performance. Combining a very low jitter and a high SDE remains a challenge. Here, we report on highly efficient superconducting nanowire single-photon detectors based on amorphous MoSi, combining sy…
We show in this paper that it is possible to induce superconducting vortices in a gold nanowire connected to superconducting electrodes. The gold nanowire acquires superconductivity by the proximity effect. The differential magnetoresistance of the nanowire beyond a critical magnetic field shows uniform oscillations with increasing field with a period of \phi0/(2\pir^2) (\phi0 = h/2e is the superconducting flux quantum, r = 35 nm is the radius of the nanowire). We demonstrate that these periodic oscillations are the signatures of the sequential generation and moving of vortices across the gold…
We present high performance fiber-coupled niobium titanium nitride superconducting nanowire single photon detectors fabricated on thermally oxidized silicon substrates. The best device showed a system detection efficiency (DE) of 74%, dark count rate of 100 c/s, and full width at half maximum timing jitter of 68 ps under a bias current of 18.0 uA with a practical Gifford-McMahon cryocooler system. We also introduced six detectors into the cryocooler and confirmed that the system DE of all detectors was higher than 67% at the dark count rate of 100 c/s.
The basis for superconducting electronics can broadly be divided between two technologies: the Josephson junction and the superconducting nanowire. While the Josephson junction (JJ) remains the dominant technology due to its high speed and low power dissipation, recently proposed nanowire devices offer improvements such as gain, high fanout, and compatibility with CMOS circuits. Despite these benefits, nanowire-based electronics have largely been limited to binary operations, with devices switching between the superconducting state and a high-impedance resistive state dominated by uncontrolled…
Magnetoresistance oscillations were observed on networks of superconducting ultrathin Nb nanowires presenting evidences of either thermal or quantum activated phase slips. The magnetic transport data, discussed in the framework of different scenarios, reveal that the system behaves coherently in the temperature range where the contribution of the fluctuations is important.
State-of-the-art Superconducting Nanowire Single Photon Detectors based on low-Tc materials reach 100% quantum efficiency. However, the response time is limited to >1-10 ns. Recently, it has been shown that due to a much lower kinetic inductance, a 100 ps response rate can be achieved in 120 $μ$m-long $MgB_{2}$ nanowires. In this work, we demonstrate experimentally that such $MgB_{2}$ nanowires function as single-photon detectors for both visible ($λ$= 630 nm) and infrared ($λ$= 1550 nm) photons when biased close to the critical current, with a dark count rate of <10 cps. $MgB_{2}$ photodetect…
We study optimization of superconducting properties of inhomogeneous nanowires. The main goal of this research is to find an optimized geometry that allows one to maximize the desired property of superconductors, such as the maximum value of local superconducting gap or total condensation energy. We consider axially symmetric design of multi-layered nanowires with possibility to adjust and change the layers thickness. We use numerical solution of the Bogoliubov-de Gennes equations to obtain the local superconducting gap for different arrangements of the inhomogeneous structures. The value of t…
Detecting spatial and temporal information of individual photons by using single-photon-detector (SPD) arrays is critical to applications in spectroscopy, communication, biological imaging, astronomical observation, and quantum-information processing. Among the current SPDs1,detectors based on superconducting nanowires have outstanding performance2, but are limited in their ability to be integrated into large scale arrays due to the engineering difficulty of high-bandwidth cryogenic electronic readout3-8. Here, we address this problem by demonstrating a scalable single-photon imager using a si…
With the rising societal demand for more information-processing capacity with lower power consumption, alternative architectures inspired by the parallelism and robustness of the human brain have recently emerged as possible solutions. In particular, spiking neural networks (SNNs) offer a bio-realistic approach, relying on pulses analogous to action potentials as units of information. While software encoded networks provide flexibility and precision, they are often computationally expensive. As a result, hardware SNNs based on the spiking dynamics of a device or circuit represent an increasing…
Superconducting nanowires undergoing quantum phase-slips have potential for impact in electronic devices, with a high-accuracy quantum current standard among a possible toolbox of novel components. A key element of developing such technologies is to understand the requirements for, and control the production of, superconducting nanowires that undergo coherent quantum phase-slips. We present three fabrication technologies, based on using electron-beam lithography or neon focussed ion-beam lithography, for defining narrow superconducting nanowires, and have used these to create nanowires in niob…
In this paper, the design of superconducting-nanowire single-photon detectors which are insensitive to the polarization of the incident light is investigated. By using high-refractive-index dielectrics, the index mismatch between the nanowire and the surrounding media is reduced. This enhances the absorption of light with electric field vector perpendicular to the nanowire segments, which is generally hindered in this kind of detectors. Building on this principle and focusing on NbTiN nanowire devices, we present several easy-to-realize cavity architectures which allow high absorption efficien…
We present the results from an experimental study of the magneto-transport of superconducting wires of amorphous Indium-Oxide, having widths in the range 40 - 120 nm. We find that, below the superconducting transition temperature, the wires exhibit clear, reproducible, oscillations in their resistance as a function of magnetic field. The oscillations are reminiscent of those which underlie the operation of a superconducting quantum interference device.
Robust porous silicon substrates were employed for generating interconnected networks of superconducting ultrathin Nb nanowires. Scanning electron microscopy analysis was performed to investigate the morphology of the samples, which constitute of polycrystalline single wires with grain size of about 10 nm. The samples exhibit nonzero resistance over a broad temperature range below the critical temperature, fingerprint of phase slippage processes. The transport data are satisfactory reproduced by models describing both thermal and quantum fluctuations of the superconducting order parameter in t…
We derived the I-V characteristics of short nanowire in the circuit with and without resistive and inductive shunt. For that we used numerical calculations in the framework of time-dependent Ginzburg-Landau equations with different relaxation times for the amplitude and phase dynamics. We also derived dependence of the I-V characteristics on flux in superconducting quantum interference device (SQUID) made of such two weak links.
We have fabricated 5 nm ultra-thin NbN nanowires that form a dense and regular array in the linear channels of mesoporous SBA-15 silica substrates. Bulk NbN is a well-known classical superconductor with Tc of 16 K. We show that, by being incorporated into this nanostructure, the composite material exhibits typical quasi-one-dimensional characteristics. We compare the superconducting properties with those of superconducting Pb nanowires of same dimensionality in identical configuration within the linear SBA-15 pores. While Pb nanowire arrays show a pronounced crossover from 1D superconductivity…
Nanoimprint lithography (NIL) is an attractive nonconventional lithographic technique in the fabrication of superconducting nanowires for superconducting nanowire single-photon detectors (SNSPDs) with large effective detection areas or multi-element devices consisting of hundreds of SNSPDs, due to its low cost and high throughput. In this work, NIL was used to pattern superconducting nanowires with meander-type structures based on ultra-thin (~4 nm) Nb films deposited by DC-magnetron sputtering at room temperature. A combination of thermal-NIL and UV-NIL was exploited to transfer the meander p…
We study experimentally the low temperature resistance of superconducting nanowires connected to normal metal reservoirs. We find that a substantial fraction of the nanowires is resistive, down to the lowest temperature measured, indicative of an intrinsic boundary resistance due to the Andreev-conversion of normal current to supercurrent. The results are successfully analyzed in terms of the kinetic equations for diffusive superconductors.
Controlling thermal transport is important for a range of devices and technologies, from phase change memories to next-generation electronics. This is especially true in nano-scale devices where thermal transport is altered by the influence of surfaces and changes in dimensionality. In superconducting nanowire single-photon detectors, the thermal boundary conductance (TBC) between the nanowire and the substrate it is fabricated on influences most of the performance metrics that make these detectors attractive for applications. This includes the maximum count rate, latency, jitter, and quantum …
We propose an optimized design for nanowire superconducting single photon detectors, using the recently discovered position dependent detection efficiency in these devices. This knowledge allows an optimized the design of meandering wire NbN detectors by altering the field distribution across the wire. In order to calculate the response of the detectors with different geometries, we use a monotonic local detection efficiency from a nanowire and optical absorption distribution via finite-different-time-domain simulations. The calculations predict a trade-off between average absorption and the e…
We present the characteristics of superconducting nanowire single photon detectors (SNSPDs) fabricated from amorphous Mo0.75Ge0.25 thin-films. Fabricated devices show a saturation of the internal detection efficiency at temperatures below 1 K, with system dark count rates below 500 counts per second. Operation in a Gifford-McMahon (GM) cryocooler at 2.5 K is possible with system detection efficiencies (SDE) exceeding 20% for SNSPDs which have not been optimized for high detection efficiency.
Statistical studies on the performance of different superconducting nanowire single-photon detectors (SNSPDs) on one chip suggested that random constrictions existed in the nanowire that were barely registered by scanning electron microscopy. With the aid of advanced e-beam lithography, artificial geometric constrictions were fabricated on SNSPDs as well as single nanowires. In this way, we studied the influence of artificial constrictions on SNSPDs in a straight forward manner. By introducing artificial constrictions with different wire widths in single nanowires, we concluded that the dark c…
Quantum phase slip (QPS) is the particular manifestation of quantum fluctuations of the order parameter of a current-biased quasi-1D superconductor. The QPS event(s) can be considered a dynamic equivalent of tunneling through conventional Josephson junction containing static in space and time weak link(s). At low temperatures T<<Tc the QPS effect leads to finite resistivity of narrow superconducting channels and suppresses persistent currents in tiny nanorings. Here we demonstrate that the quantum tunneling of phase may result in Coulomb blockade: superconducting nanowire, imbedded in high-Ohm…
The voltage-carrying state of superconducting NbTiN nanowires, used for single-photon detectors, is analyzed. Upon lowering the current, the wire returns to the superconducting state in a steplike pattern, which differs from sample to sample. Elimination of geometrical inhomogeneities, such as sharp corners, does not remove these steplike features. They appear to be intrinsic to the material. Since the material is strongly disordered, electronic inhomogeneities are considered as a possible cause. A thermal model, taking into account random variations of the electronic properties along the wire…
We report on several low temperature experiments supporting the presence of Majorana fermions in superconducting lead nanowires fabricated with a scanning tunneling microscope. These nanowires are the connecting bridges between the STM tip and the sample resulting from indentation processes. We show here that by a controlled tuning of the geometry of the nanowire region, in which superconductivity is confined by applied magnetic fields, the conductance curves obtained in these situations are indicative of topological superconductivity and Majorana fermions. The most prominent feature of this b…
An external magnetic field is needed to drive a nanowire in proximity to an s-wave superconductor into a topological regime which supports Majorana end states. However, a magnetic field generally suppresses the proximity superconducting gap induced on the nanowire. In recent experiments using InSb nanowires coupled to Al, the induced proximity gap vanishes at magnetic fields B~1T. This results in a small superconducting gap on the wire and a narrow topological regime which is proportional to the strength of the magnetic field. In this work, we show that by placing nanowires in proximity to rec…
We have used a neon focused-ion-beam to fabricate both nanoscale Nb Dayem bridges and NbN phase-slip nanowires located at the short-circuited end of quarter-wavelength coplanar waveguide resonators. The Dayem bridge devices show flux-tunability and intrinsic quality factor exceeding 10,000 at 300 mK up to local fields of at least 60 mT. The NbN nanowires show signatures of incoherent quantum tunnelling of flux at 300 mK.
Many superconducting technologies such as rapid single flux quantum computing (RSFQ) and superconducting quantum interference devices (SQUIDs) rely on the modulation of nonlinear dynamics in Josephson junctions for functionality. More recently, however, superconducting devices have been developed based on the switching and thermal heating of nanowires for use in fields such as single photon detection and digital logic. In this paper, we use resistive shunting to control the nonlinear heating of a superconducting nanowire and compare the resulting dynamics to those observed in Josephson junctio…
We report on the transport properties of an array of N about 30 interconnected Nb nanowires, grown by sputtering on robust porous Si substrates. The analyzed system exhibits a broad resistive transition in zero magnetic field, H, and highly nonlinear V(I) characteristics as a function of H which can be both consistently described by quantum tunneling of phase slips.
We report on simulation results that shows optimum photon absorption by superconducting nanowires can happen at a fill-factor that is much less than 100%. We also present experimental results on high performance of our superconducting nanowire single photon detectors realized using NbTiN on oxidized silicon.
Quantum fluctuations in quasi-one-dimensional superconducting channels leading to spontaneous changes of the phase of the order parameter by $2π$, alternatively called quantum phase slips (QPS), manifest themselves as the finite resistance well below the critical temperature of thin superconducting nanowires and the suppression of persistent currents in tiny superconducting nanorings. Here we report the experimental evidence that in a current-biased superconducting nanowire the same QPS process is responsible for the insulating state -- the Coulomb blockade. When exposed to RF radiation, the i…
We report the fabrication of strongly coupled nanohybrid superconducting junctions using PbS semiconductor nanowires and Pb0.5In0.5 superconducting electrodes. The maximum supercurrent in the junction reaches up to ~15 μA at 0.3 K, which is the highest value ever observed in semiconductor-nanowire-based superconducting junctions. The observation of microwave-induced constant voltage steps confirms the existence of genuine Josephson coupling through the nanowire. Monotonic suppression of the critical current under an external magnetic field is also in good agreement with the narrow junction mod…
Microwave Fabry-Perot resonators containing nonlinear mesoscopic elements (such as superconducting nanowires) can be used to explore many-body circuit QED. Here, we report on observations of a superconductor-normal pulsing regime in microwave (GHz) coplanar waveguide resonators consisting of superconducting MoGe films interrupted by a gap that is bridged by one or more suspended superconducting nanowires. This regime, which involve MHz-frequency oscillations in the amplitude of the supercurrent in the resonator, are achieved when the steady-state amplitude of the current in the driven resonato…
Quantum phase slippage (QPS) in a superconducting nanowire is a new candidate for developing a quantum bit. It has also been theoretically predicted that the occurrence of QPS significantly changes the current-phase relationship (CPR) of the wire due to the tunneling between topologically different metastable states. We present studies on the microwave response of the superconducting nanowires to reveal their CPRs. First, we demonstrate a simple nanowire fabrication technique, based on commercially available adhesive tapes, which allows making thin superconducting wire from different metals. W…
Superconducting nanowire single photon detectors are capable of single-photon detection across a large spectral range, with near unity detection efficiency, picosecond timing jitter, and sub-10 $μ$m position resolution at rates as high as 10$^{9}$ counts/s. In an effort to bring this technology into nuclear physics experiments, we fabricate Niobium Nitride nanowire detectors using ion beam assisted sputtering and test their performance in strong magnetic fields. We demonstrate that these devices are capable of detection of 400 nm wavelength photons with saturated internal quantum efficiency at…
We report microwave transmission measurements of superconducting Fabry-Perot resonators (SFPR), having a superconducting nanowire placed at a supercurrent antinode. As the plasma oscillation is excited, the supercurrent is forced to flow through the nanowire. The microwave transmission of the resonator-nanowire device shows a nonlinear resonance behavior, significantly dependent on the amplitude of the supercurrent oscillation. We show that such amplitude-dependent response is due to the nonlinearity of the current-phase relationship (CPR) of the nanowire. The results are explained within a no…
We estimate the depairing current of superconducting nanowire single photon detectors (SNSPDs) by studying the dependence of the nanowires kinetic inductance on their bias current. The kinetic inductance is determined by measuring the resonance frequency of resonator style nanowire coplanar waveguides both in transmission and reflection configurations. Bias current dependent shifts in the measured resonant frequency correspond to the change in the kinetic inductance, which can be compared with theoretical predictions. We demonstrate that the fast relaxation model described in the literature ac…
We use external magnetic field to probe the detection mechanism of superconducting nanowire single photon detector. We argue that the hot belt model (which assumes partial suppression of the superconducting order parameter $Δ$ across the whole width of the superconducting nanowire after absorption of the single photon) does not explain observed weak field dependence of the photon count rate (PCR) for photons with $λ$=450 nm and noticeable {\it decrease} of PCR (with increasing the magnetic field) in some range of the currents for photons with wavelengths $λ$ =450-1200 nm. Found experimental re…
We present low-temperature measurements of low-loss superconducting nanowire-embedded resonators in the low-power limit relevant for quantum circuits. The superconducting resonators are embedded with superconducting nanowires with widths down to 20nm using a neon focused ion beam. In the low-power limit, we demonstrate an internal quality factor up to 3.9x10^5 at 300mK [implying a two-level-system-limited quality factor up to 2x10^5 at 10 mK], not only significantly higher than in similar devices but also matching the state of the art of conventional Josephson-junction-embedded resonators. We …
