We study NbTiN resonators by measurements of the temperature dependent resonance frequency and frequency noise. Additionally, resonators are studied covered with SiOx dielectric layers of various thicknesses. The resonance frequency develops a non-monotonic temperature dependence with increasing SiOx layer thickness. The increase in the noise is independent of the SiOx thickness, demonstrating that the noise is not dominantly related to the low temperature resonance frequency deviations.
We report a reduction of the frequency noise in coplanar waveguide superconducting resonators. The reduction of 7 dB is achieved by removing the exposed dielectric substrate surface from the region with high electric fields and by using NbTiN. In a model-analysis the surface of NbTiN is found to be a negligible source of noise, experimentally supported by a comparison with NbTiN on SiOx resonators. The reduction is additive to decreasing the noise by widening the resonators.
Single photon level quality factors of 500x10^3 are shown in NbTiN superconducting resonators at millikelvin temperatures. This result originates from the intrinsic low dielectric loss of NbTiN, as demonstrated by comparison with Ta, and by removing unnecessary parts of the dielectric substrate.
We systematically study the performance of compact lumped element planar microwave $\mathrm{Nb_{70}Ti_{30}N}$ (NbTiN) resonators operating at 5 GHz in external in-plane magnetic fields up to 440 mT, a broad temperature regime from 2.2 K up to 13 K, as well as mK temperatures. For comparison, the resonators have been fabricated on thermally oxidized and pristine, (001) oriented silicon substrates. When operating the resonators in the multi-photon regime at $T=2.2$ K, we find internal quality factors $Q_{\mathrm{int}}\simeq$ $2\cdot10^5$ for NbTiN resonators grown on pristine Si substrates, whil…
NbTiN Nanowire Resonators for Spin-Photon Coupling on Solid Neon
RIKEN Center for Quantum Computing(理化学研究所量子计算中心);Department of Mechanical Engineering, FAMU-FSU College of Engineering, Florida State University(佛罗里达州立大学 FAMU-FSU 工程学院机械工程系);Advanced ICT Research Institute, National Institute of Information and Communications Technology (NICT)(国家信息通信技术研究所先进 ICT 研究所);Graduate School of Engineering, Tohoku University(东北大学研究生院工学研究科);Department of Physics and Astronomy, University of Notre Dame(圣母大学物理与天文系);Institute of Physics, University of Augsburg(奥格斯堡大学物理研究所);Center for Advanced Analytics and Predictive Sciences, University of Augsburg(奥格斯堡大学高级分析与预测科学中心)
We present microwave-frequency NbTiN resonators on silicon, systematically achieving internal quality factors above 1 M in the quantum regime. We use two techniques to reduce losses associated with two-level systems: an additional substrate surface treatment prior to NbTiN deposition to optimize the metal-substrate interface, and deep reactive-ion etching of the substrate to displace the substrate-vacuum interfaces away from high electric fields. The temperature and power dependence of resonator behavior indicate that two-level systems still contribute significantly to energy dissipation, sugg…
We present superconducting microwave-frequency resonators based on NbTiN nanowires. The small cross section of the nanowires minimizes vortex generation, making the resonators resilient to magnetic fields. Measured intrinsic quality factors exceed $2\times 10^5$ in a $6$ T in-plane magnetic field, and $3\times 10^4$ in a $350$ mT perpendicular magnetic field. Due to their high characteristic impedance, these resonators are expected to develop zero-point voltage fluctuations one order of magnitude larger than in standard coplanar waveguide resonators. These properties make the nanowire resonato…
Dielectric measurements on insulating materials at cryogenic temperatures can be challenging, depending on the frequency and temperature ranges of interest. We present a technique to study the dielectric properties of bulk dielectrics at GHz frequencies. A superconducting coplanar Nb resonator is deposited directly on the material of interest, and this resonator is then probed in distant-flip-chip geometry with a microwave feedline on a separate chip. Evaluating several harmonics of the resonator gives access to various probing frequencies, in the present studies up to 20 GHz. We demonstrate t…
We measure temperature dependent quasiparticle fluctuations in a small Al volume, embedded in a NbTiN superconducting microwave resonator. The resonator design allows for read-out close to equilibrium. By placing the Al film on a membrane, we enhance the fluctuation level and separate quasiparticle from phonon effects. When lowering the temperature, the recombination time saturates and the fluctuation level reduces a factor $\sim$100. From this we deduce that the number of free quasiparticles is still thermal. Therefore, the theoretical, inverse relation between quasiparticle number and recomb…
Slow noise processes, with characteristic timescales ~1s, have been studied in planar superconducting resonators. A frequency locked loop is employed to track deviations of the resonator centre frequency with high precision and bandwidth. Comparative measurements are made in varying microwave drive, temperature and between bare resonators and those with an additional dielectric layer. All resonators are found to exhibit flicker frequency noise which increases with decreasing microwave drive. We also show that an increase in temperature results in a saturation of flicker noise in resonators wit…
Lossy dielectrics are a significant source of decoherence in superconducting quantum circuits. In this report, we model and compare the dielectric loss in bulk and interfacial dielectrics in titanium nitride (TiN) and aluminum (Al) superconducting coplanar waveguide (CPW) resonators. We fabricate isotropically trenched resonators to produce a series of device geometries that accentuate a specific dielectric region's contribution to resonator quality factor. While each dielectric region contributes significantly to loss in TiN devices, the metal-air interface dominates the loss in the Al device…
The complex dielectric constant $\hatε = ε_1 + i ε_2$ of SrTiO$_3$ reaches high values $ε_1 \approx 2*10^{4}$ at cryogenic temperatures, while the dielectric losses ($ε_2$) are much stronger than for other crystalline dielectrics. SrTiO$_3$ is a common substrate for oxide thin films, like the superconducting LaAlO$_3$/SrTiO$_3$ system, but the large $ε_1$ and $ε_2$ restrict high-frequency quantum devices on SrTiO$_3$. Here we present superconducting coplanar Nb resonators on SrTiO$_3$, which we successfully operate in a distant-flip-chip geometry at frequencies that exceed 1 GHz. We find a pro…
Superconducting coplanar waveguide resonators that can operate in strong magnetic fields are important tools for a variety of high frequency superconducting devices. Magnetic fields degrade resonator performance by creating Abrikosov vortices that cause resistive losses and frequency fluctuations, or suppressing superconductivity entirely. To mitigate these effects we investigate lithographically defined artificial defects in resonators fabricated from NbTiN superconducting films. We show that by controlling the vortex dynamics the quality factor of resonators in perpendicular magnetic fields …
Areal density of disorder-induced resonators with a high quality factor, $Q\gg 1$, in a film with fluctuating refraction index is calculated theoretically. We demonstrate that for a given $kl>1$, where $k$ is the light wave vector, and $l$ is the transport mean free path, when {\em on average} the light propagation is diffusive, the likelihood for finding a random resonator increases dramatically with increasing the correlation radius of the disorder. Parameters of {\em most probable} resonators as functions of $Q$ and $kl$ are found.
Superconducting resonators provide a convenient way to measure loss tangents of various dielectrics at low temperature. For the purpose of examining the microscopic loss mechanisms in dielectrics, precise measurements of the internal quality factor at different values of energy stored in the resonators are required. Here, we present a consistent method to analyze a LC superconducting resonator coupled to a transmission line. We first derive an approximate expression for the transmission S-parameter $S_{21}$ based on a complete circuit model. In the weak coupling limit, we show that the interna…
We consider the effect of dynamical localization on the lifetimes of the resonances in open wave-chaotic dielectric cavities. We show that dynamical localization leads to a log-normal distribution of the resonance lifetimes which scales with the localization length in excellent agreement with the results of numerical calculations for open rough microcavities.
In this paper we describe a methodology for tailoring the design of metamaterial dielectric resonators, which represent a promising path toward low-loss metamaterials at optical frequencies. We first describe a procedure to decompose the far field scattered by subwavelength resonators in terms of multipolar field components, providing explicit expressions for the multipolar far fields. We apply this formulation to confirm that an isolated high-permittivity cube resonator possesses frequency separated electric and magnetic dipole resonances, as well as a magnetic quadrupole resonance in close p…
Dielectric optical micro-resonators and micro-lasers represent a realization of a wave-chaotic system, where the lack of symmetry in the resonator shape leads to non-integrable ray dynamics. Modes of such resonators display a rich spatial structure, and cannot be classified through mode indices which would require additional constants of motion in the ray dynamics. Understanding and controlling the emission properties of such resonators requires the investigation of the correspondence between classical phase space structures of the ray motion inside the resonator and resonant solutions of the …
Microwave delivery to samples in a cryogenic environment can pose experimental challenges such as restricting optical access, space constraints and heat generation. Moreover, existing solutions that overcome various experimental restrictions do not necessarily provide a large, homogeneous oscillating magnetic field over macroscopic lengthscales, which is required for control of spin ensembles or fast gate operations in scaled-up quantum computing implementations. Here we show fast and coherent control of a negatively charged nitrogen vacancy spin ensemble by taking advantage of the high permit…
Due to their exceptional mechanical and optical properties, dielectric silicon nitride (SiN) micromembrane resonators have become the centerpiece of many optomechanical experiments. Efficient capacitive coupling of the membrane to an electrical system would facilitate exciting hybrid optoelectromechanical devices. However, capacitive coupling of such dielectric membranes is rather weak. Here we add a single layer of graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. Th…
The recent realization of topological phases in insulators and superconductors has advanced the quest for robust quantum technologies. The prospects to implement the underlying topological features controllably has given incentive to explore optical platforms for analogous realizations. Here we realize a topologically induced defect state in a chain of dielectric microwave resonators and show that the functionality of the system can be enhanced by supplementing topological protection with non-hermitian symmetries that do not have an electronic counterpart. We draw on a characteristic topologic…
We report the first observation of low power drive level sensitivity, hyperparametric amplification, and single-mode hyperparametric oscillations in a dielectric rutile whispering-gallery mode resonator at 4.2 K. The latter gives rise to a comb of sidebands at 19.756 GHz. Whereas, most frequency combs in the literature have been observed in optical systems using an ensemble of equally spaced modes in microresonators or fibers, the present work represents generation of a frequency comb using only a single-mode. The experimental observations are explained by an additional 1/2 degree-of-freedom o…
While several experiments claim that two-level system (TLS) defects in amorphous surfaces/interfaces are responsible for energy relaxation in superconducting resonators and qubits, none can provide quantitative explanation of their data in terms of the conventional noninteracting TLS model. Here a model that interpolates between the interacting and noninteracting TLS loss tangent is proposed to perform numerical analysis of experimental data and extract information about TLS parameters and their distribution. As a proof of principle, the model is applied to TESLA cavities that contain only a s…
Nonlinear superconducting devices, typically based on Josephson Junction (JJ) nonlinearities, are the basis for superconducting quantum electronics, enabling, e.g., the formation of isolated two-level superconducting qubits and amplifiers. While emerging spin, hybrid spin/superconducting (including Majorana), and nano-magneto-optical quantum systems could benefit tremendously from superconducting nonlinearities, the presence of strong magnetic fields in these systems are incompatible with conventional JJ devices, which are highly sensitive to applied magnetic fields. One potential solution is …
Random matrix theory has proven very successful in the understanding of the spectra of chaotic systems. Depending on symmetry with respect to time reversal and the presence or absence of a spin 1/2 there are three ensembles, the Gaussian orthogonal (GOE), Gaussian unitary (GUE), and Gaussian symplectic (GSE) one. With a further particle-antiparticle symmetry the chiral variants of these ensembles, the chiral orthogonal, unitary, and symplectic ensembles (the BDI, AIII, and CII in Cartan's notation) appear which are the main point of interest in this paper. Following a recently published work o…
The nonlinear surface resistance Rs of the YBa2Cu3O7-x superconducting thin films on the MgO substrates was researched in the Hakki-Coleman dielectric resonator at the microwave signal powers from -18 dBm to +30 dBm at the ultra high frequency of 25 GHz in the range of temperatures from 12 K to 85 K. The dependences of the surface resistance on the temperature RS(T) in the YBa2Cu3O7-x superconducting thin films at the microwaves were measured. The dependence of the surface resistance on the microwave power RS(P) in the YBa2Cu3O7-x superconducting thin films at the microwaves were found at the …
We demonstrate a sideband-resolved cavity electromechanical system operating at room temperature. The mechanical resonator, a strongly pre-stressed silicon nitride string, is dielectrically coupled to a three-dimensional microwave cavity made of copper. The electromechanical coupling is characterized by two measurements, the cavity-induced eigenfrequency shift of the mechanical resonator and the optomechanically induced transparency. While the former is dominated by dielectric effects, the latter reveals a clear signature of the dynamical backaction of the cavity field on the resonator. This u…
Nanoscale dielectric resonators and quantum-confined semiconductors have enabled unprecedented control over light absorption and excited charges, respectively. In this work, we embed luminescent silicon nanocrystals (Si-NCs) into a 2D array of SiO2 nanocylinders, and experimentally prove a powerful concept: the resulting metamaterial preserves the radiative properties of the Si-NCs and inherits the spectrally-selective absorption properties of the nanocylinders. This hierarchical approach provides increased photoluminescence (PL) intensity obtained without utilizing any lossy plasmonic compone…
We present a novel design of optical micro-cavity where the optical energy resides primarily in free space, therefore is readily accessible to foreign objects such as atoms, molecules, mechanical resonators, etc. We describe the physics of these resonators, and propose a design method based on stochastic optimization. Cavity designs with diffraction-limited mode volumes and quality factors in the range of $10^4$--$10^6$ are presented. With a purely planar geometry, the cavity can be easily integrated on-chip using conventional micro- and nano- fabrication processes.