脉冲laser沉积复合氧化物的研究进展
Recent advances in pulsed-laser deposition of complex-oxides
摘要：
脉冲激光沉积（PLD）是制备复合氧化物异质结构、超晶格和可控界面的最有前途的技术之一。本文的第一部分介绍了几个有用的修改过程中，包括组合方法的启发方法的审查。然后，我们讨论了详细的生长动力学结果，这表明，“真正的”逐层（LBL）的增长只能接近，但不能完全满足，即使许多表征技术揭示接口与意想不到的锐度。时间分辨的表面X-射线衍射测量结果表明，结晶和大多数层间质量传输发生在时间尺度上的羽流/基板相互作用，提供直接的实验证据表明，存在一个生长制度，其中非热过程占主导地位PLD。这种理解显示了动力学生长操作如何使PLD比当今可用的任何其他生长方法更接近理想的LBL。
英文摘要：
Pulsed-laser deposition (PLD) is one of the most promising techniques for the formation of complex-oxide heterostructures, superlattices, and well-controlled interfaces. The first part of this paper presents a review of several useful modifications of the process, including methods inspired by combinatorial approaches. We then discuss detailed growth kinetics results, which illustrate that 'true' layer-by-layer (LBL) growth can only be approached, but not fully met, even though many characterization techniques reveal interfaces with unexpected sharpness. Time-resolved surface x-ray diffraction measurements show that crystallization and the majority of interlayer mass transport occur on time scales that are comparable to those of the plume/substrate interaction, providing direct experimental evidence that a growth regime exists in which non-thermal processes dominate PLD. This understanding shows how kinetic growth manipulation can bring PLD closer to ideal LBL than any other growth method available today.
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