arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 0708.1464cond-mat.mtrl-sci
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用于化学传感的簇组装微阵列的批量制备

Batch fabrication of cluster assembled microarrays for chemical sensing

E. Barborini, M. Leccardi, G. Bertolini, O. Rorato, P. Repetto, D. Bandiera, M. Gatelli, A. Raso, A. Garibbo, L. Seminara, C. Ducati, P. Milani

摘要:

从气相沉积团簇正成为生产纳米结构器件的一种使能技术。超音速团簇束沉积(SCBD)是制备纳米结构薄膜的一种可行方法。通过使用SCBD并通过利用超声束的典型空气动力学效应,可以获得非常高的沉积速率,同时控制中性团簇质量分布,允许沉积具有定制纳米结构的薄膜。由于高沉积速率、高横向分辨率、低温处理,SCBD可用于在具有有限或没有后生长处理的微和纳米制造平台上集成簇组装膜。在这里,我们提出了批量制造的气体传感器微阵列的基础上沉积在微加工基板上的过渡金属氧化物纳米颗粒的工业机会。

英文摘要:

Deposition of clusters from the gas phase is becoming an enabling technology for the production of nanostructured devices. Supersonic clusters beam deposition (SCBD) has been shown as a viable route for the production of nanostructured thin films. By using SCBD and by exploiting aerodynamical effects typical of supersonic beams it is possible to obtain very high deposition rates with a control on neutral cluster mass distribution, allowing the deposition of thin films with tailored nanostructure. Due to high deposition rates, high lateral resolution, low temperature processing, SCBD can be used for the integration of cluster-assembled films on micro- and nanofabricated platforms with limited or no post-growth processing. Here we present the industrial opportunities for batch fabrication of gas sensor microarrays based on transition metal oxide nanoparticles deposited on microfabricated substrates.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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