基于晶粒尺寸分布的单相微晶硅微结构研究
Elucidation of microstructure of single-phase microcrystalline silicon based on crystallite size distributions
摘要：
采用SiF 4-H2混合气体等离子体制备了高度结晶的非掺杂氢化微晶硅薄膜，并采用不同的微结构探针研究了不同生长阶段的薄膜结构。我们的自洽的结果阐明了各个方面的薄膜微结构的演变，成分变化和晶粒尺寸分布与薄膜生长的变化。包含在微观结构数据分析的双峰微晶尺寸分布导致的结果是确证与从其他微观结构的工具，并产生一个更准确的物理和一致的描述微晶硅膜的微观结构。
英文摘要：
Highly crystallized undoped hydrogenated microcrystalline silicon films prepared using SiF4-H2 mixture plasma were investigated at various stages of growth employing different microstructural probes. Our self-consistent results elucidate various aspects of the evolution of film microstructure, compositional changes and variations in crystallite size distributions with film growth. Inclusion of a bimodal crystallite size distribution in microstructural data analysis leads to results that are corroborative with those obtained from other microstructural tools, and yields a more physically accurate and coherent description of microcrystalline silicon film microstructure.
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