2404.02170
2024-04-04
physics.optics
physics.app-ph
physics.ins-det
50%
Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
Michael Tanksalvala, Christina L. Porter, Yuka Esashi, Bin Wang, Nicholas W. Jenkins, Zhe Zhang, Galen P. Miley, Joshua L. Knobloch, Brendan McBennett, Naoto Horiguchi, Sadegh Yazdi, Jihan Zhou, Matthew N. Jacobs, Charles S. Bevis, Robert M. Karl, Peter Johnsen, David Ren, Laura Waller, Daniel E. Adams, Seth L. Cousin, Chen-Ting Liao, Jianwei Miao, Michael Gerrity, Henry C. Kapteyn, Margaret M. Murnane
专题命中
多模态生成
:multimodal(abstract)