Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis
机构 * IBM Research -- Tokyo(IBM东京研究实验室) ; IBM Semiconductors(IBM半导体公司)
专题命中 诊断辅助 :diagnosis(title,abstract);分类 cs.LG
Comments Published as K. Miyaguchi, M. Joko, R. Sheraw and T. Idé, "Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis : DM: Big Data Management and Machine Learning," 2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Albany, NY, USA, 2025, pp. 1-6, doi: 10.1109/ASMC64512.2025.11010308