XMM EPIC MOS CCD的亚像素结构的X射线测量
X-ray Measurement of the subpixel structure of the XMM EPIC MOS CCD
摘要：
我们在这里报告的网格实验的结果，以测量亚像素结构的EPIC MOS CCD上的XMM X射线天文台。像素大小为40 $μ$平方米，而网格孔间距为48 $μ$米，这是与我们的标准网格实验完全不同的组合。我们已经验证了这种组合功能正常，并分析了亚像素分辨率的CCD结构。EPIC MOS CCD具有开放电极结构，以提高低能量下的检测效率。我们得到了像素内各种等级的X射线事件的分布。在形成直的垂直像素边界的沟道停止附近产生水平分裂的两像素事件，而在由于薄化的栅极结构而产生的电势形成波状水平像素边界的地方产生垂直分裂的两像素事件。因此，有效像素形状不是正方形，而是失真的。X射线事件的分布清楚地显示了每个像素中的两个蚀刻区域，其由放大（开放）电极的桥接指状物分开。我们使用O-K和Cu-L X射线发射线测量了像素的常规区域和开放区域之间的X射线透射的差异，并且发现其与包括Si的$0.2\pm0.1μ$ m和SiO2的$0.6\pm0.2μ$ m的电极厚度一致。
英文摘要：
We report here the results of a mesh experiment to measure the subpixel structure of the EPIC MOS CCDs on board the XMM X-ray observatory. The pixel size is 40$μ$m square while the mesh hole spacing is 48$μ$m, a combination quite different from our standard mesh experiment. We have verified that this combination functions properly and have analyzed the CCD structure with sub-pixel resolution. The EPIC MOS CCD has an open electrode structure to improve detection efficiency at low energies. We obtained the distribution of various grades of X-ray events inside the pixel. A horizontally split two-pixel event is generated near the channel stop which forms a straight vertical pixel boundary whereas a vertically split two-pixel event is generated where the potential due to the thinned gate structure forms a wavy horizontal pixel boundary. Therefore, the effective pixel shape is not a square but is distorted. The distribution of X-ray events clearly shows that the two etched regions in each pixel, separated by the bridging finger of the enlarged (open) electrode. We measured the difference in X-ray transmission between the conventional and open regions of the pixel using O-K and Cu-L X-ray emission lines, and found it to be consistent with an electrode thickness comprising $0.2\pm0.1μ$m of Si and $0.6\pm0.2μ$m of SiO2.
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