RF产生的氢/氦等离子体中热原子氢的催化产生证据
Evidence of Catalytic Production of Hot Atomic Hydrogen in RF Generated Hydrogen/Helium Plasmas
摘要：
对射频产生的低压H2/He等离子体中的氢巴耳末系线的线形的研究产生的结果表明，氦和氢物种之间的催化过程导致“热”（约1000 K）的产生。28 eV）原子氢。即使远离电极的“热”原子氢是主要的H2/He等离子体。对于这些等离子体，冷原子氢和热原子氢（热/冷>2.5）的线形状、相对线面积对于电极之间的区域和远离电极的区域非常相似。相比之下，在H2/H2O中，在电极之间仅发现“温”（<5eV）氢（温/冷<1.0），并且仅冷氢远离电极。早期的假设，在等离子体中的优先氢线加宽的结果从加速的离子氢在电极附近，和Ar/H2+的特殊的电荷交换特性是清楚地被目前的结果，表明氢原子线形状是相似的H2/He等离子体在整个相对较大的圆柱形（14厘米ID × 36厘米长）腔。
英文摘要：
A study of the line shapes of hydrogen Balmer series lines in RF generated low pressure H2/He plasmas produced results suggesting a catalytic process between helium and hydrogen species results in the generation of 'hot' (ca. 28 eV) atomic hydrogen. Even far from the electrodes 'hot' atomic hydrogen was predominant in H2/He plasmas. Line shapes, relative line areas of cold and hot atomic hydrogen (hot/cold>2.5), were very similar for areas between the electrodes and far from the electrodes for these plasmas. In contrast, in H2/Xe only 'warm' (<5 eV) hydrogen (warm/cold<1.0) was found between the electrodes, and only cold hydrogen away from the electrodes. Earlier postulates that preferential hydrogen line broadening in plasmas results from the acceleration of ionic hydrogen in the vicinity of electrodes, and the special charge exchange characteristics of Ar/H2+ are clearly belied by the present results that show atomic hydrogen line shape are similar for H2/He plasmas throughout the relatively large cylindrical (14 cm ID x 36 cm length) cavity.
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