用于微系统和原子芯片的金字塔微镜
Pyramidal micro-mirrors for microsystems and atom chips
摘要：
通过在氢氧化钾中的各向异性蚀刻，在硅晶片的（100）表面中产生凹金字塔。然后通过将金溅射到金字塔的光滑硅（111）面上来形成高质量的微镜。这些反射镜显示出很大的前景，作为高品质的光学器件，适合集成到MOEMS和原子芯片。我们已经证明，这种形状的结构可以用来激光冷却和保持原子在磁光阱。
英文摘要：
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS and atom chips. We have shown that structures of this shape can be used to laser-cool and hold atoms in a magneto-optical trap.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
