高效率超高真空兼容EUV波段平场谱仪
A High Efficiency Ultra High Vacuum Compatible Flat Field Spectrometer for EUV Wavelengths
摘要：
报道了一种定制的平场极紫外光谱仪，该光谱仪是专门为低功率光源而设计的。光谱仪的光谱范围从4 nm扩展到40 nm。该仪器优化了聚光能力和信噪比，同时实现了良好的分辨率。的光谱仪和设计考虑的详细描述，以及一个新的程序，可以用来获得一个合成的波长校准的帮助下，只有一个已知的光谱特征。这种合成波长校准相比，从以前报道的谱线，Ar和Ne离子记录与此光谱仪获得的标准波长校准。
英文摘要：
A custom, flat field, extreme ultraviolet EUV spectrometer built specifically for use with low power light sources that operate under ultrahigh vacuum conditions is reported. The spectral range of the spectrometer extends from 4 nm to 40 nm. The instrument optimizes the light gathering power and signal to noise ratio while achieving good resolution. A detailed description of the spectrometer and design considerations are presented, as well as a novel procedure that could be used to obtain a synthetic wavelength calibration with the aid of only a single known spectral feature. This synthetic wavelength calibration is compared to a standard wavelength calibration obtained from previously reported spectral lines of Xe, Ar and Ne ions recorded with this spectrometer.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
