再论高温等离子体中的反常射频场穿透
Revisiting the anomalous rf field penetration into a warm plasma
摘要：
射频波不穿透等离子体，在等离子体中受到阻尼，波的电场和等离子体电流集中在表层等离子体边界附近。由于电子的热运动，电子可以将等离子体电流从皮肤层传输出去。结果，当考虑电子温度效应时，皮层的宽度增加。这种现象称为反常趋肤效应。射频电场的反常穿透不仅发生在横向传播到等离子体边界波（电感耦合等离子体）时，而且发生在沿等离子体边界传播的波（电容耦合等离子体）时。射频场的这种异常穿透改变了电容鞘层的结构。报道了电容鞘层非线性、非局部理论的最新进展。结果表明，分离的电场分布成指数和非指数部分产生一个有效的定性和定量描述的电感和电容耦合等离子体中的反常趋肤效应。
英文摘要：
Radio frequency waves do not penetrate into a plasma and are damped within it. The electric field of the wave and plasma current are concentrated near the plasma boundary in a skin layer. Electrons can transport the plasma current away from the skin layer due to their thermal motion. As a result, the width of the skin layer increases when electron temperature effects are taken into account. This phenomenon is called anomalous skin effect. The anomalous penetration of the rf electric field occurs not only for transversely propagating to the plasma boundary wave (inductively coupled plasmas) but also for the wave propagating along the plasma boundary (capacitively coupled plasmas). Such anomalous penetration of the rf field modifies the structure of the capacitive sheath. Recent advances in the nonlinear, nonlocal theory of the capacitive sheath are reported. It is shown that separating the electric field profile into exponential and non-exponential parts yields an efficient qualitative and quantitative description of the anomalous skin effect in both inductively and capacitively coupled plasma.
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