紫外Laser光束在聚合物微孔加工中的实验和理论研究进展
Recent Experimental and Theoretical Advances in Microdrilling of Polymers with Ultraviolet Laser Beams
摘要：
当孔直径在10至50 μ m的范围内时，激光钻孔变得越来越重要，对于该范围，常规的替代方法变得困难且成本低。此外，它被视为许多复合材料和硬质材料的选择技术，这些材料不容易通过接触机械工具在微观水平上加工。我们已经证明，合适的实验条件能够在纯聚合物如PET，PI，PC，PS，PMMA，PEEK等中产生具有创纪录纵横比（高达600）的微孔。例如，直径通常为30 μ m的孔可以长达18 mm，在该深度下，钻孔速率接近于零并且轮廓静止。可类似地进行激光微钻孔的其它材料（金属、陶瓷）不表现出如此高的纵横比。钻削过程的机理已被详细研究，并已建立了一个原始的分析模型最近。各种实验结果，获得与KrF激光器，将重点审查的参数，导致形成良好的孔具有高的纵横比。对于该应用，同样重要的是要注意，这样高的纵横比值是用给出3 mrad标准发散度的KrF激光器的规则配置获得的。然而，如模型所示，通过使用具有较低发散度的光束（理论极限为0.2 mrad），仍有改进的空间。进一步的实验工作正在进行中。
英文摘要：
Laser drilling becomes of increasing importance when hole diameter is in the range of 10 to 50 mum, for which conventional alternative approaches are becoming difficult and cost inefficient. Furthermore, it is viewed as the technique of choice for a number of composite materials and hard materials which are not readily processed at the microscopic level by contact mechanical tools. We have demonstrated that suitable experimental conditions are capable of producing microholes with record aspect-ratio (up to 600) in pure polymers like PET, PI, PC, PS, PMMA, PEEK,... For example holes of diameter typically 30 mum can be as long as 18 mm, depth at which the drilling rate is getting nearly zero and the profile stationary. Other materials (metals, ceramics) which can be similarly laser microdrilled do not exhibit such very high aspect-ratio. The mechanisms of the drilling process have been studied in details and an original analytical model has been constructed recently. The various experimental results, obtained with the KrF laser, will be reviewed with emphasis on the parameters leading to formation of good holes with high aspect-ratio. For the application it is also important to note that such high values of aspect-ratio are obtained with regular configuration of the KrF laser giving a standard divergence of 3 mrad. However as shown by the model there is still room for improvement by using a beam with a lower divergence (theoretical limit is 0.2 mrad). Further experimental work is now in progress.
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