正则化方法和最小二乘拟合方法获得的EEDF的比较分析
A comparative analysis of the EEDF obtained by regularization methods and by a least-squares fitting
摘要：
为了建立电子能量分布函数（EEDF），采用Tikhonov奇异值分解正则化方法对朗缪尔探针的电流-电压（I-V）特性的二阶导数进行数值积分。讨论了数值积分EDDF和最小二乘拟合EDDF的比较。在ECR等离子体源中，用圆柱形探针测量了所用的I-V特性，并用Laframboise理论确定了等离子体参数。该技术允许在任何气压下快速分析等离子体参数。对于ECR等离子体源的情况，所得到的EEDF显示了具有不同温度的两组电子的存在。这一结果与ECR等离子体源中发生的碰撞机制加热有关，在ECR等离子体源中，低压等离子体通过共振区中产生的高能电子对基态分子或原子的电子碰撞电离来维持。
英文摘要：
To establish the electron energy distribution function (EEDF), the second derivative of a Langmuir probe current-voltage (I-V) characteristic is numerically integrated using the Tikhonov singular value decomposition regularized method. A comparison of the numerically intagrated EDDF and by a least-squares fitting is discussed. The used I-V haracteristic is measured in an ECR plasma source using a cylindrical probe and the plasma parameters are determined by the Laframboise theory. This technique allows a rapid analysis of plasma parameters at any gas pressure. The obtained EEDF, for the case of the ECR plasma source, shows the existence of two groups of electrons with different temperatures. This result is associated with the collisional mechanism heating taking place in ECR plasma sources, where low pressure plasma is sustained by electron impact ionization of the ground state molecules or atoms by energetic electrons arising in the resonance zone.
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