用于倾斜测量的多窗口散焦散斑照相系统
Multi-windowed defocused speckle photographic system for tilt measurement
摘要:
散焦散斑照相术长期以来一直用于测量粗糙表面的旋转。本文解释了如何通过添加适当的穿孔掩模,一些测量属性,如范围或横向分辨率,可能会改变在希望。特别地,最大可测量倾斜可以显著提高,尽管以较差的横向分辨率为代价。与先前描述的技术相比的优点包括散斑尺寸和光学系统孔径的独立调谐以及对不同测量需求的更扩展的适应性。对新老技术的优缺点进行了全面的比较。
英文摘要:
Defocused speckle photography has long been used to measure rotations of rough surfaces. This paper explains how, by adding a suitably perforated mask, some measurement properties, such as range or lateral resolution, may be changed at wish. Particularly, the maximum measurable tilt can be significantly raised, although at the expense of poorer lateral resolution. Advantages over previously described techniques include independent tuning of speckle size and optical system aperture and more extended adaptability to different measuring needs. The benefits and disadvantages of the new and old techniques are thoroughly compared.
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