基于纳机电系统的惯性质量传感的极限
Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
摘要：
现在可以实现纳米机械谐振器，其实现超过1GHz的基本谐振频率，其中品质因数（Q）在1，000 - 100，000的范围内。这些器件极小的有效质量，加上它们的高Q，转化为前所未有的惯性质量灵敏度。这使它们成为各种质量传感应用的自然候选者。在这里，我们评估了在真空中工作的纳米机械谐振器的最终质量灵敏度限制，这是由一些基本的物理噪声过程。我们的分析表明，纳米机械谐振器为质量传感提供了巨大的潜力-最终在单个分子的水平上实现分辨率。
英文摘要：
Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 1,000 - 100,000. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo, which are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing - ultimately with resolution at the level of individual molecules.
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