MEMS中的缺陷梁：采用Cosserat方法进行部件级建模的非理想杆模型
Defective beams in MEMS: a model of non-ideal rods using a Cosserat approach for component level modelling
摘要：
我们提出并推导出一种技术，用于引入缺陷的光束模型的基础上Cosserat理论的杆。该技术的目的是用于MEMS器件中使用的非理想杆的组件模型的推导。我们还提出了一个工作通过的斑点/缺口缺陷的例子（其中棒有一个区域与过量/缺乏材料）和一个指南的模型与随机坑和斑点沿梁的长度。最后，我们提出了一个组件级模型的梁的缺陷，并比较它的结果从有限元分析模拟。我们测试Cosserat模型的两种情况下，没有任何缺陷和四个缺陷。结果非常一致，理想情况下的最大差异为0.5%，除一种缺陷情况外，所有缺陷情况下的差异均小于1%，例外情况是在极端情况下的2%误差，预计模型会崩溃。总的来说，Cosserat模型有缺陷和没有缺陷提供了一个精确的建模细长梁的方法。此外，仿真时间大大减少，通过这种方法和进一步发展的组件级模型，以及有限元分析组件是重要的实用而准确的建模MEMS的预测和比较。
英文摘要：
We present and derive a technique for the introduction of defects into a beam model based on the Cosserat theory of rods. The technique is designed for the derivation of component models of non-ideal rods for use in MEMS devices. We also present a worked through example of blob/nick defects (where the rod has an area with an excess/lack of material) and a guide for a model with random pits and blobs along the length of the beam. Finally we present a component level model of a beam with a defect and compare it to results from a Finite Element Analysis simulation. We test the Cosserat model for two cases without any defect and four with a defect. Results are in good agreement with a maximum 0.5% difference for the ideal case and under 1% differences for all but one of the defective cases, the exception being a 2% error in an extreme case for which the model is expected to break down. Overall, the Cosserat model with and without defects provides an accurate way of modelling long slender beams. In addition, simulation times are greatly reduced through this approach and further development for both component level models as well as as FEA components is important for practical yet accurate modelling of MEMS both for prediction and comparison.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
