基于连续衍射调制的片上表面声波整形
On-Chip Shaping of Surface Acoustic Waves via Continuous Diffractive Modulation
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中文总结 AI 辅助
针对各向异性压电衬底上SAW精确整形的难题，提出连续衍射声透镜（CDAL），结合各向异性薄元传播模型实现逆设计，经实验验证可调控SAW场分布，为片上SAW调制提供高精度兼容方案。
中文摘要 AI 辅助
在各向异性压电衬底上精确整形表面声波（SAW）因弹性各向异性和机电耦合而变得复杂。本文提出一种连续衍射声透镜（CDAL），其中亚波长金属化产生的弱相速度扰动与衍射共同驱动横向场重新分布。各向异性薄元传播模型可实现CDAL轮廓的高效逆设计。激光多普勒振动测量验证了规定的横向场分布及不等宽度的多通道分束。通过将连续衍射调制与离散源相位编码结合，我们进一步将横向场整形为贝塞尔分布，实现了振幅与相位的联合控制。本研究为片上SAW场调制提供了高精度且与制备兼容的机制。
英文摘要
Precise shaping of surface acoustic waves (SAWs) on anisotropic piezoelectric substrates is complicated by elastic anisotropy and electromechanical coupling. Here we introduce a continuous diffractive acoustic lens (CDAL), in which weak phase-velocity perturbations produced by subwavelength metallization, together with diffraction, drive lateral field redistribution. An anisotropic thin-element propagation model enables efficient inverse design of the CDAL contour. Laser Doppler vibrometry verifies prescribed lateral field profiles and multichannel beam splitting with unequal widths. By combining continuous diffractive modulation with discrete source-phase encoding, we further shape the lateral field into a Bessel profile, demonstrating joint amplitude-and-phase control. This work provides a high-precision and fabrication-compatible mechanism for on-chip SAW field modulation.
发表机构
- Key Laboratory of Modern Acoustics (MOE), School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University（南京大学现代声学重点实验室（教育部），物理学院，先进微结构协同创新中心）
机构由 AI 辅助整理，请以论文原文为准。
