发表机构
School of Physics and Astronomy, Monash University; Monash Centre for Electron Microscopy, Monash University; Department of Materials Science & Engineering, Monash University（蒙纳士大学物理与天文学院; 蒙纳士大学电子显微镜中心; 蒙纳士大学材料科学与工程系）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
针对纳米器件小型化带来的掺杂剂三维分布测定需求，提出利用单张离焦光谱扫描透射电子显微镜图像的几何分析方法，结合统计检测与贝叶斯推断，实现了掺杂剂深度约2纳米精度的测定。
AI 中文摘要
纳米级器件的不断小型化使得确定掺杂剂的三维分布愈发重要。在离焦光谱扫描透射电子显微镜图像中，掺杂剂原子呈现为半径与掺杂剂深度相关的圆盘，可通过对单张离焦图像进行简单几何分析确定掺杂剂的三维分布。通过对硅掺杂石墨烯的数值实验，验证了统计检测与贝叶斯推断方法，以量化置信度与不确定性，同时提升低剂量下分析的稳健性。还展示了铁掺杂尖晶石的概念验证实验数据，将掺杂剂深度的测量精度控制在约2纳米范围内。
英文摘要
Increasing miniaturization of nanoscale devices makes determining the three-dimensional distribution of dopants increasingly important. In out-of-focus spectroscopic scanning transmission electron microscopy images, we show that dopant atoms appear as disks with radii relating to dopant depth, allowing the three-dimensional distribution of dopants to be determined from simple geometric analysis of a single out-of-focus image. Through numerical experiments on Si-doped graphene we validate statistical detection and Bayesian inference methods to quantify confidence and uncertainties while making the analysis more robust at lower dose. We present proof-of-concept experimental data from an Fe-doped spinel, retrieving dopant depth to within around 2 nanometres.
