发表机构
Ruhr University Bochum（鲁尔大学波鸿分校）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
本文提出非线性双鞘层电路模型，统一描述对称与不对称低压电容耦合射频等离子体，揭示不对称性增强谐波与串联共振振荡的机理。
AI 中文摘要
我们为低压电容耦合等离子体开发了一个非线性自洽双鞘层电路模型，该模型适用于几何对称以及不对称放电。准中性等离子体主体由电感-电阻元件表示，并与稳态粒子和电子能量平衡相耦合。两个边界鞘层均使用具有有界微分电纳的lncosh鞘层电荷-电压模型进行动态处理，该模型基于微分鞘层宽度的Riccati闭合。该模型在小电荷极限下恢复二次耗尽鞘层关系，而特征鞘层尺度则通过无碰撞Child-Langmuir/Bohm闭合由射频平均鞘层电压确定。由此产生的四变量射频子系统包含两个鞘层电荷、隔直电容电压和放电电流。在对称单频极限下，两个鞘层非线性强烈补偿，直流自偏压消失，而几何或电不对称则破坏这种补偿，增强谐波产生和等离子体串联共振振荡。
英文摘要
We develop a nonlinear self-consistent two-sheath circuit model for low-pressure capacitively coupled plasmas that applies to geometrically symmetric as well as asymmetric discharges. The quasineutral plasma bulk is represented by an inductive-resistive element and coupled to stationary particle and electron-energy balances. Both boundary sheaths are treated dynamically using a lncosh sheath charge-voltage model with bounded differential elastance, based on a Riccati closure for the differential sheath width. The model recovers the quadratic depletion-sheath relation in the small-charge limit, while the characteristic sheath scales are determined from the RF-averaged sheath voltages using a collisionless Child-Langmuir/Bohm closure. The resulting four-variable RF subsystem contains the two sheath charges, the blocking-capacitor voltage, and the discharge current. In the symmetric monofrequent limit, the two sheath nonlinearities compensate strongly and the dc self-bias vanishes, whereas geometrical or electrical asymmetry breaks this compensation and enhances harmonic generation and plasma-series-resonance oscillations.
